ARI: Advanced Post Processing Instrumentation for Miniaturization Technologies

ARI：用于小型化技术的先进后处理仪器

• 批准号: 9601720
• 负责人: Michael Vasile
• 金额: $ 60万
• 依托单位: Louisiana Tech University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1996
• 资助国家: 美国
• 起止时间: 1996-09-15 至 2000-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9601720&HistoricalAwards=false
• 关键词: ARI; Advanced; Post; Processing; Instrumentation

*** 9601720 Warrington This Academic Research Infrastructure award provides funding to purchase an injection molding machine, electroplating stations, a scanning Auger spectroscope, and an optical interferometric microscope. The injection molding machine and electroplating stations will enable the mass fabrication of microparts. The injection molding machine will replicate microparts in plastics, and the electroplating stations will allow for micro part production in a variety of metals. The scanning Auger spectroscope and optical interferometric microscope will be used to analyze and test the micro parts themselves and the masks and molds that are used to make them. The scanning Auger spectroscope will be used to determine surface/interfacial chemical composition, which is critical in the fabrication of masks, molds, and micro parts. The optical interferometric microscope will be used to measure surface roughness and geometry. This equipment will augment existing fabrication equipment at the Institute for Micromanufacturing and in the College of Engineering and Science at Louisiana Tech University. The above equipment will enable and enhance research on the production and application of masks and molds used in micropart fabrication and will also enable the direct fabrication of microparts from these molds in a variety of materials. Nine projects in the microelectromechanical systems (MEMS) technologies will take advantage of the equipment. In particular, the injection molding machine will be used to model and experimentally verify the micromolding process and will serve to rapidly fabricate microsystem packaging concepts. The machine will also be used to develop methods for mass replication of microstructures and systems using polymer molds. The electroplating stations will be used to create microstructures in nickel, gold and other materials and for rapid, economical fabrication of micromilling tools. The scanning Auger spectrometer is an instrument for identifying surface and int erfacial contamination, which detracts from the quality of plating processes, photo resist, wafer adhesion, and multi-level structure fabrication. This instrument will have use across the university. The optical interferometric microscope will be used to quantify vertical and sloped surfaces up to 5 mm in height. The proposed equipment will allow for the development of process technology unique in the world, and for the measurement, analysis, and replication of micro- to macro-scale devices from masks and molds with three-dimensional surface features. ***

*9601720沃灵顿这个学术研究基础设施奖为购买注塑机、电镀工位、扫描俄歇光谱仪和光学干涉显微镜提供资金。注塑机和电镀工位将使微型零件的大规模制造成为可能。注塑机将复制塑料中的微型零件，而电镀工位将允许生产各种金属的微型零件。扫描俄歇光谱仪和光学干涉显微镜将用于分析和测试微型部件本身以及用于制造它们的掩膜和模具。扫描俄歇光谱仪将用于确定表面/界面的化学成分，这在掩模、模具和微型零件的制造中是至关重要的。光学干涉显微镜将用于测量表面粗糙度和几何形状。该设备将增强路易斯安那理工大学微型制造研究所和工程与科学学院的现有制造设备。上述设备将促进和加强微型零件制造中使用的掩膜和模具的生产和应用的研究，还将使这些模具能够直接在各种材料中制造微型零件。微电子机械系统(MEMS)技术方面的九个项目将利用该设备。特别是，注塑机将用于对微成型过程进行建模和实验验证，并将用于快速制造微系统封装概念。该机器还将用于开发使用聚合物模具大规模复制微结构和系统的方法。电镀工位将用于制造镍、金和其他材料的微结构，并用于快速、经济地制造微型铣削工具。扫描俄歇能谱是一种识别表面和界面污染的仪器，它降低了电镀工艺、光致抗蚀剂、晶片粘合和多层结构制造的质量。这台仪器将在全校使用。光学干涉显微镜将用于对高度达5毫米的垂直和倾斜表面进行量化。拟议的设备将允许开发世界上独一无二的工艺技术，并允许从具有三维表面特征的掩模和模具测量、分析和复制微观到宏观尺度的设备。***