ARI: Advanced Post Processing Instrumentation for Miniaturization Technologies

*** 9601720沃灵顿该学术研究基础设施奖提供资金购买注塑机，电镀站，扫描俄歇光谱仪和光学干涉显微镜。注塑机和电镀站将使微型零件的大规模制造成为可能。注塑机将在塑料中复制微型部件，而电镀站将允许在各种金属中生产微型部件。扫描俄歇光谱仪和光学干涉显微镜将用于分析和测试微型部件本身以及用于制造它们的掩模和模具。扫描俄歇分光镜将用于确定表面/界面化学成分，这在面具，模具和微型部件的制造中至关重要。光学干涉显微镜将用于测量表面粗糙度和几何形状。该设备将增强路易斯安那理工大学微制造研究所和工程与科学学院现有的制造设备。上述设备将能够并加强对用于微部件制造的掩模和模具的生产和应用的研究，并且还将使这些模具在各种材料中直接制造微部件成为可能。9个微机电系统（MEMS）技术项目将利用该设备。特别是，注塑机将用于模拟和实验验证微成型过程，并将用于快速制造微系统包装概念。该机器还将用于开发使用聚合物模具大规模复制微结构和系统的方法。电镀站将用于在镍、金和其他材料上制造微结构，并用于快速、经济地制造微铣削工具。扫描俄歇光谱仪是一种用于识别表面和内部污染的仪器，这些污染会影响电镀工艺、光抗蚀剂、晶圆附着力和多层结构制造的质量。这台仪器将在整个大学使用。光学干涉显微镜将用于量化垂直和倾斜表面高达5毫米的高度。拟议的设备将允许开发世界上独一无二的工艺技术，并用于测量，分析和复制具有三维表面特征的面具和模具的微观到宏观设备。＊＊＊

*** 9601720 Warrington This Academic Research Infrastructure award provides funding to purchase an injection molding machine, electroplating stations, a scanning Auger spectroscope, and an optical interferometric microscope. The injection molding machine and electroplating stations will enable the mass fabrication of microparts. The injection molding machine will replicate microparts in plastics, and the electroplating stations will allow for micro part production in a variety of metals. The scanning Auger spectroscope and optical interferometric microscope will be used to analyze and test the micro parts themselves and the masks and molds that are used to make them. The scanning Auger spectroscope will be used to determine surface/interfacial chemical composition, which is critical in the fabrication of masks, molds, and micro parts. The optical interferometric microscope will be used to measure surface roughness and geometry. This equipment will augment existing fabrication equipment at the Institute for Micromanufacturing and in the College of Engineering and Science at Louisiana Tech University. The above equipment will enable and enhance research on the production and application of masks and molds used in micropart fabrication and will also enable the direct fabrication of microparts from these molds in a variety of materials. Nine projects in the microelectromechanical systems (MEMS) technologies will take advantage of the equipment. In particular, the injection molding machine will be used to model and experimentally verify the micromolding process and will serve to rapidly fabricate microsystem packaging concepts. The machine will also be used to develop methods for mass replication of microstructures and systems using polymer molds. The electroplating stations will be used to create microstructures in nickel, gold and other materials and for rapid, economical fabrication of micromilling tools. The scanning Auger spectrometer is an instrument for identifying surface and int erfacial contamination, which detracts from the quality of plating processes, photo resist, wafer adhesion, and multi-level structure fabrication. This instrument will have use across the university. The optical interferometric microscope will be used to quantify vertical and sloped surfaces up to 5 mm in height. The proposed equipment will allow for the development of process technology unique in the world, and for the measurement, analysis, and replication of micro- to macro-scale devices from masks and molds with three-dimensional surface features. ***