Instrumentation to Enable and Enhance Three-Dimensional Nanofabrication Capabilities in the National NanofabricationUsers Network

在国家纳米制造用户网络中实现和增强三维纳米制造能力的仪器

• 批准号: 9601886
• 负责人: Robert Davis
• 金额: $ 48.09万
• 依托单位: Pennsylvania State Univ University Park
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1996
• 资助国家: 美国
• 起止时间: 1996-10-01 至 1999-09-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9601886&HistoricalAwards=false
• 关键词: Instrumentation; Enable; Enhance; Three; Dimensional

9601886 Davis Nanofabrication, or the fabrication of solid structures on the nanometer size scale, has evolved into a field which is the foundation of a significant fraction of the world economy, namely, the semiconductor integrated circuit industry. The ability and potential of this field to fabricate small structures for use in other fields such as optics, physics, materials science, chemistry, biology, medicine, and mechanics is also being quickly realized by both researchers and industry. Yet, with the exception of some materials growth techniques, the field of nanofabrication has been somewhat confined to the two lateral dimensions which are defined by the plane of a smooth solid surface. This is partly due to depth-of-field issues which are important and common to optical and electron beam lithography, the difficulty of plasma etching a wide variety of materials to form high aspect ratio structures, and the difficulty of characterizing fine structures in three dimensions, to name a few. The National Nanofabrication Users Network (NNUN), an NSF-sponsored network of five university nanofabrication laboratories, has been tasked with providing user-facility service to the US nanofabrication community (including industry, academia, and government laboratories), and to provide technical leadership to that same community toward the solutions of problems. The NNUN consists of sites at five universities, with two sites (Cornell and Stanford) serving as primaries with the remaining three (Howard, Penn State, and University of California at Santa Barbara) serving as subcontractors. Together, these five University laboratories unite expertise in silicon processing (Stanford), nanometer lithography (Cornell), wide-bandgap materials (Howard), novel materials (Penn State), and III-V processing (UCSB), all within the common theme of nanofabrication. To date, the Network is serving a user base which is rapidly approaching 1000 users, service which is implemented and enhanced by project referral s, sharing of laboratory and teaching techniques and information, and complementary capabilities. This award will find acquisition of a: A Chemical Mechanical Polishing (CMP) System: This system, to be located at the Cornell site, will permit the chemical mechanical etchback of structures for planarization and bring CMP capabilities to the NNUN; Reactive Ion Etching Additions: Due to the importance of anisotropic etching to the nanofabrication of 3D structures, Penn State will add an RIE for materials such as transparent oxides, piezoelectrics, and plastics.

纳米制造或在纳米尺寸尺度上制造固体结构已经发展成为一个领域，该领域是世界经济的重要部分，即半导体集成电路工业的基础。 该领域制造用于其他领域的小型结构的能力和潜力，如光学，物理学，材料科学，化学，生物学，医学和机械学，也正在迅速实现研究人员和工业界。 然而，除了一些材料生长技术之外，纳米纤维的领域在某种程度上被限制在由光滑固体表面的平面限定的两个横向维度上。 这部分是由于景深问题，这是重要的和常见的光学和电子束光刻，等离子体蚀刻各种各样的材料，以形成高纵横比结构的困难，以及在三维中表征精细结构的困难，仅举几例。 国家纳米纤维用户网络（NNUN）是一个由五所大学纳米纤维实验室组成的NSF赞助的网络，其任务是为美国纳米纤维社区（包括工业界，学术界和政府实验室）提供用户设施服务，并为同一社区提供技术领导，以解决问题。 NNUN由五所大学的网站组成，其中两个网站（康奈尔大学和斯坦福大学）作为初选，其余三个网站（霍华德，宾夕法尼亚州立大学和加州大学圣巴巴拉分校）作为分包商。 这五所大学的实验室结合了硅加工（斯坦福大学）、纳米光刻（康奈尔大学）、宽带隙材料（霍华德）、新型材料（宾夕法尼亚州立大学）和III-V族加工（UCSB）的专业知识，所有这些都在纳米纤维的共同主题内。 到目前为止，该网络正在为一个用户群提供服务，其用户数量迅速接近1000个，通过项目推荐、分享实验室和教学技术和信息以及补充能力来实施和加强服务。 该奖项将发现收购： 化学机械抛光系统：这一系统将设在康奈尔场址，将允许对结构进行化学机械回蚀，以便平面化，并使北方国立大学具备化学机械抛光能力; 反应离子蚀刻添加剂：由于各向异性蚀刻对3D结构纳米织物的重要性，宾夕法尼亚州立大学将为透明氧化物，压电和塑料等材料添加RIE。