Soft X-Ray Sources and Optics for High Spatial, Temporal, and Spectral Resolution Interferometry and Microscopy

用于高空间、时间和光谱分辨率干涉测量和显微镜的软 X 射线源和光学器件

• 批准号: 9612204
• 负责人: Howard Milchberg
• 金额: $ 49.02万
• 依托单位: University of Maryland, College Park
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1996
• 资助国家: 美国
• 起止时间: 1996-09-15 至 2000-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9612204&HistoricalAwards=false
• 关键词: Soft; Ray; Sources; Optics; Spatial

Proposal Number: ECS-961224 Principal Investigator: Howard Milchberg Title: Soft X-ray Sources and Optics for High Spatial, Temporal and Spectral Resolution Interferometry Abstract: The research focuses on the construction and application of a high resolution (25 nm) X-ray microscope to problems in lithography and biology. The instrument will be suitable either for scanning or imaging microscopy and has the potential of enabling single shot imaging of biological samples without distortion of the samples.

提案编号：ECS-961224主要研究人员：霍华德·米尔奇格（Howard Milchberg）标题：软X射线源和光学源，用于高空间，时间和光谱分辨率干涉率摘要：该研究侧重于高分辨率（25 nm）X射线显微镜在静音学和生物学中的X射线显微镜的构建和应用。该仪器将适用于扫描或成像显微镜，并有可能在没有样品失真的情况下对生物样品进行单射击成像。