Soft X-Ray Sources and Optics for High Spatial, Temporal, and Spectral Resolution Interferometry and Microscopy

用于高空间、时间和光谱分辨率干涉测量和显微镜的软 X 射线源和光学器件

• 批准号: 9612204
• 负责人: Howard Milchberg
• 金额: $ 49.02万
• 依托单位: University of Maryland, College Park
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1996
• 资助国家: 美国
• 起止时间: 1996-09-15 至 2000-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9612204&HistoricalAwards=false
• 关键词: Soft; Ray; Sources; Optics; Spatial

Proposal Number: ECS-961224 Principal Investigator: Howard Milchberg Title: Soft X-ray Sources and Optics for High Spatial, Temporal and Spectral Resolution Interferometry Abstract: The research focuses on the construction and application of a high resolution (25 nm) X-ray microscope to problems in lithography and biology. The instrument will be suitable either for scanning or imaging microscopy and has the potential of enabling single shot imaging of biological samples without distortion of the samples.

提案编号：ECS-961224 主要研究者：霍华德Milchberg 标题：高空间、时间和光谱分辨率干涉测量的软X射线源和光学器件 摘要： 研究重点是高分辨率（25 nm）X射线显微镜的构建和应用，以解决光刻和生物学问题。该仪器将适合于扫描或成像显微镜，并有可能使生物样品的单次拍摄成像没有失真的样品。