SBIR Phase I: A New Active Vibration Control Method for Precision Machines

SBIR 第一阶段：精密机器的新型主动振动控制方法

• 批准号: 9660326
• 负责人: Felix Rosenthal
• 金额: $ 7.5万
• 依托单位: Signal Separation Technologies Inc
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1997
• 资助国家: 美国
• 起止时间: 1997-01-01 至 1997-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9660326&HistoricalAwards=false
• 关键词: SBIR; Phase; New; Active; Vibration

*** 96-60326 Rosenthal This Small Business Innovative Research (SBIR) Phase I project will explore control of vibrations for front-end semiconductor manufacturing equipment, where micron precision is required. This control is required at sub-Hertz (Hz) frequencies, where local seismic activity and disturbances in the manufacturing plant often cause vibrations of the supporting floor. Presently available vibration isolation tables are not effective below 1 Hz. A true multi-channel active feed-forward vibration controller is needed that minimizes the total positional error of manufacturing equipment being controlled. Phase I will investigate a new method called SFR-SVD, meaning signal-free reference using singular value decomposition, to provide effective vibration isolation at micron resolution and sub-Hertz frequencies. It is expected to reduce vibration by at least 20 decibels from 0.1 Hz to 100 Hz. Commercial application will be found in integrated circuit manufacturing facilities of the semiconductor industry. The cost of semiconductor foundry buildings may be significantly reduced. ***

*** 96-60326 Rosenthal 这个小型企业创新研究 (SBIR) 第一阶段项目将探索需要微米精度的前端半导体制造设备的振动控制。 在亚赫兹 (Hz) 频率下需要这种控制，在这种情况下，制造工厂中的局部地震活动和干扰经常会导致支撑地板的振动。 目前可用的隔振台在低于 1 Hz 时无效。 需要一种真正的多通道主动前馈振动控制器，以最大限度地减少受控制造设备的总位置误差。 第一阶段将研究一种称为 SFR-SVD 的新方法，即使用奇异值分解的无信号参考，以在微米分辨率和亚赫兹频率下提供有效的隔振。 预计可将 0.1 Hz 至 100 Hz 范围内的振动减少至少 20 分贝。 商业应用将在半导体行业的集成电路制造设施中找到。半导体代工厂厂房的成本可能会显着降低。 ***