SBIR Phase I: A New Active Vibration Control Method for Precision Machines

*96-60326罗森塔尔这个小型企业创新研究第一阶段项目将探索对需要微米精度的前端半导体制造设备的振动进行控制。这种控制需要在亚赫兹(HZ)频率下进行，在这种频率下，制造工厂中的局部地震活动和干扰经常会导致支撑楼板的振动。目前可用的隔振台在1赫兹以下不起作用。需要一种真正的多通道主动前馈振动控制器，以最小化被控制造设备的总位置误差。第一阶段将研究一种名为SFR-SVD的新方法，即使用奇异值分解的无信号参考，以在微米分辨率和亚赫兹频率下提供有效的隔振。预计它将从0.1赫兹到100赫兹减少至少20分贝的振动。商业应用将在半导体行业的集成电路制造设施中找到。半导体代工建筑的成本可能会大幅降低。***

*** 96-60326 Rosenthal This Small Business Innovative Research (SBIR) Phase I project will explore control of vibrations for front-end semiconductor manufacturing equipment, where micron precision is required. This control is required at sub-Hertz (Hz) frequencies, where local seismic activity and disturbances in the manufacturing plant often cause vibrations of the supporting floor. Presently available vibration isolation tables are not effective below 1 Hz. A true multi-channel active feed-forward vibration controller is needed that minimizes the total positional error of manufacturing equipment being controlled. Phase I will investigate a new method called SFR-SVD, meaning signal-free reference using singular value decomposition, to provide effective vibration isolation at micron resolution and sub-Hertz frequencies. It is expected to reduce vibration by at least 20 decibels from 0.1 Hz to 100 Hz. Commercial application will be found in integrated circuit manufacturing facilities of the semiconductor industry. The cost of semiconductor foundry buildings may be significantly reduced. ***