SBIR Phase II: A New Active Vibration Control Method for Precision Machines

* 9800937 Rosenthal这个小型企业创新研究（SBIR）第二阶段项目将为六自由度（DOF）隔振台开发一个新的多通道控制器原型。 新的工作台将减轻先进的亚微米线宽半导体生产和计量机械的振动。 该控制器将多通道主动控制的新方法应用于振动主动控制。 现有的振动控制台虽然足以用于当今的半导体生产和测量设备中的振动控制，但对于新兴的半导体技术将是不够的，在新兴的半导体技术中，六自由度台振动必须被控制到低得多的振动水平。 现有的六自由度系统控制每个通道的运动独立的不太可能的假设，除非并置，致动器和误差传感器相互解耦。 结果，现有的桌子趋于变得不稳定并且具有有限的振动控制性能。 一种新的算法避免了这些困难，允许统一控制的参考传感器和工作台运动的几个通道。 新的控制器将扩展信号分离技术，现在是操作在多通道噪声消除器。 在敏感的电子制造操作中需要高度隔振的行业中预期有商业应用。 特别是，深紫外线和X射线光刻，半导体临界尺寸和缺陷计量，原子力和电子显微镜的操作是针对这种新的振动隔离技术。 ***

*** 9800937 Rosenthal This Small Business Innovation Research (SBIR) Phase II project will develop a new prototype multichannel controller for a six degree-of-freedom (DOF) vibration isolation table. The new table will mitigate vibration in advanced submicron line-width semiconductor production and metrology machinery. The controller will apply a new method for multi-channel active control to the active control of vibration. Available vibration control tables, while adequate for vibration control in today's semiconductor production and measuring equipment, will be inadequate for emerging semiconductor technology, in which six-DOF table vibration must be controlled to much lower levels of vibration. Existing six-DOF systems control each channel of motion independently on the unlikely assumption that, unless collocated, actuators and error sensors are decoupled from each other. As a result, existing tables tend to become unstable and to have limited vibration control performance. A new algorithm avoids these difficulties by permitting unified control of several channels of reference sensors and table motions. The new controller will extend signal separation technology that is now opertional in a multi-channel noise canceller. Commercial applications are expected in industries requiring a high degree of vibration isolation in sensitive electronics fabrication operations. In particular, operations in deep ultraviolet and X-ray lithography, semiconductor critical dimension and defect metrology, and atomic force and electron microscopy are targeted for this new vibration isolation technology. ***