SBIR Phase I: In-Situ Fiber-Optic Magnetic Field Sensor Array for Real-Time Process Control in Physical-Vapor Deposition Cluster Modules

SBIR 第一阶段：用于物理气相沉积集群模块中实时过程控制的原位光纤磁场传感器阵列

• 批准号: 9661691
• 负责人: Richard Black
• 金额: $ 7.5万
• 依托单位: INTELLIGENT FIBER OPTICS SYSTEMS CORP.
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1997
• 资助国家: 美国
• 起止时间: 1997-01-01 至 1997-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9661691&HistoricalAwards=false
• 关键词: SBIR; Phase; Situ; Fiber; Optic

*** ABSTRACT 96-61691 Black This Small Business Innovation Research Phase I project will develop a novel magnetic field sensor for in-situ process sensing. The system under investigation responds to the need for new techniques for real-time process control in semiconductor fabrication and Intelligent Fiber Optic Systems (IFOS) proposes to develop a room-temperature benchtop testbed comprising a magnetic orientation electromagnet and a portion of a semiconductor substrate chuck in conjunction with a magnetic sensor based on an innovative combination of technologies including fiber gratings and magnetostrictive coatings. During Phase I, IFOS will: (1) establish details of the sensor specifications, and design and model the sensor probes and system, (2) fabricate fiber sensor probe substrates involving fiber grating with claddings partially removed and coated by magnetostrictive material, (3) construct a feasibility prototype testbed, (4) test and evaluate prototype, and (5) deliver a final report and submit a Phase II proposal. This first-time incorporation of magnetic sensors in plasma Physical Vapor Deposition (PVD) is expected to offer improved process control for thin film head fabrication with higher sensitivity and reliability than conventional approaches. The electrically passive, in-line, multiplexible, low-cost, and mass producible sensor design developed during this research can be applied in in-situ process sensing and will find additional applications in the aerospace, electricity generation, and other industries. The aforementioned features make the proposed sensors marketable and will likely attract non-federal and private sector commercialization funding. ***

* 摘要 96-61691黑色 这个小型企业创新研究第一阶段项目将开发一种用于现场过程传感的新型磁场传感器。正在调查的系统响应的需要，在半导体制造和智能光纤系统（IFOS）的实时过程控制的新技术，提出了开发一个室温台式试验台，包括一个磁取向电磁铁和半导体衬底卡盘的一部分，结合磁传感器的基础上，包括光纤光栅和磁致伸缩涂层的技术的创新组合。在第一阶段，IFOS将：（1）建立传感器规格的细节，并设计和建模传感器探头和系统，（2）制造包括光纤光栅的光纤传感器探头衬底，其中包层部分去除并涂覆有磁致伸缩材料，（3）构建可行性原型测试台，（4）测试和评估原型，以及（5）提交最终报告并提交第二阶段提案。这是首次将磁传感器纳入等离子体物理气相沉积（PVD）中，预计将为薄膜磁头制造提供更好的工艺控制，比传统方法具有更高的灵敏度和可靠性。 在本研究中开发的电无源、在线、多功能、低成本和可批量生产的传感器设计可应用于原位过程传感，并将在航空航天、发电和其他行业中找到其他应用。上述功能使拟议的传感器具有市场价值，并可能吸引非联邦和私营部门的商业化资金。***