Engineering Research Equipment: A High Performance, Low Vacuum Scanning Electron Microscope with In-Situ Thermomechanical Loading Stages

耶鲁大学机械工程系、电气工程系和化学工程系将购买一台高性能、低真空扫描电子显微镜，该显微镜配备了热加载和机械加载仪器。该系统将提供耶鲁大学目前无法提供的新的工程研究能力和教育机会，并将主要用于支持科学和工程方面的研究项目，特别是包括铝合金的薄膜涂层和表面粗化，热疲劳可靠性和焊点的微观本构描述；用于高温半导体器件的可靠金属化；晶粒生长的非平均场描述——用于微电子学的铁电薄膜高速变温扫描隧道显微镜测定金属蚀刻反应的原子尺度机制。该设备还将提高工程教学的质量，拓宽耶鲁大学许多工程课程的范围，包括材料科学、材料的微观结构发展、材料的力学行为、一些与材料相关的实验课程，以及本科生的高级研究项目。

Tong 9700327 The Departments of Mechanical Engineering, Electrical Engineering, and Chemical Engineering at Yale University will purchase a high performance, low vacuum scanning electron microscope equipped with instrumented thermal and mechanical loading stages. This system will provide new engineering research capabilities and education opportunities currently unavailable at Yale and will be used primarily to support research projects in science and engineering, including in particular, Thin film coatings and surface roughening of aluminum alloys-, Thermal fatigue reliability and micro-level constitutive description of solder joints; Reliable metallizations for high temperature semiconductor devices; Non-mean-field description of grain growth-, Ferroelectric thin films for applications in microelectronics; Atomic-scale mechanisms of metal etching reactions determined by high-speed variable temperature scanning tunneling microscopy. The equipment will also enhance the quality of engineering teaching and broaden the scope of many engineering courses at Yale, including Materials Science, Microstructural Development in Materials, Mechanical Behavior of Materials, several materials related laboratory sessions, and undergraduate senior research projects.