Engineering Research Equipment: A High Performance, Low Vacuum Scanning Electron Microscope with In-Situ Thermomechanical Loading Stages

工程研究设备：具有原位热机械加载台的高性能、低真空扫描电子显微镜

• 批准号: 9700327
• 负责人: Wei Tong
• 金额: $ 5万
• 依托单位: Yale University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1997
• 资助国家: 美国
• 起止时间: 1997-06-01 至 1998-05-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9700327&HistoricalAwards=false
• 关键词: Engineering; Research; Equipment; Performance; Low

Tong 9700327 The Departments of Mechanical Engineering, Electrical Engineering, and Chemical Engineering at Yale University will purchase a high performance, low vacuum scanning electron microscope equipped with instrumented thermal and mechanical loading stages. This system will provide new engineering research capabilities and education opportunities currently unavailable at Yale and will be used primarily to support research projects in science and engineering, including in particular, Thin film coatings and surface roughening of aluminum alloys-, Thermal fatigue reliability and micro-level constitutive description of solder joints; Reliable metallizations for high temperature semiconductor devices; Non-mean-field description of grain growth-, Ferroelectric thin films for applications in microelectronics; Atomic-scale mechanisms of metal etching reactions determined by high-speed variable temperature scanning tunneling microscopy. The equipment will also enhance the quality of engineering teaching and broaden the scope of many engineering courses at Yale, including Materials Science, Microstructural Development in Materials, Mechanical Behavior of Materials, several materials related laboratory sessions, and undergraduate senior research projects.

通9700327 耶鲁大学的机械工程、电气工程和化学工程系将购买一台高性能、低真空扫描电子显微镜，该显微镜配备有仪表化热和机械加载台。 该系统将提供新的工程 研究 能力 和 目前耶鲁大学没有的教育机会，将主要用于支持科学和工程方面的研究项目，特别是， 铝的薄膜涂层与表面粗糙化 合金-， 热 疲劳 可靠性 和 微观层面 焊点的结构描述; 可靠 金属化 为 高 温度 半导体器件; 晶粒生长的非平均场描述， 铁电 薄 薄膜 应用 在 微电子学; 金属腐蚀反应的原子尺度机理 确定 通过 高速 可变 温度 扫描隧道显微镜 的 设备也将提高质量 工程 拓宽教学领域 的 耶鲁大学的许多工程课程，包括材料科学，微观结构， 发展 在 材料、 材料的力学行为，几个材料相关的实验室会议，和本科生高级研究项目。