Engineering Research Equipment: A High Performance, Low Vacuum Scanning Electron Microscope with In-Situ Thermomechanical Loading Stages

童9700327耶鲁大学机械工程、电气工程和化学工程系将购买一台高性能、低真空扫描电子显微镜，配备仪表化的热和机械加载平台。该系统将提供耶鲁大学目前没有的新的工程研究能力和教育机会，并将主要用于支持科学和工程方面的研究项目，特别是包括铝合金的薄膜涂层和表面粗化--焊点的热疲劳可靠性和微观本构描述；高温半导体器件的可靠金属化；颗粒生长的非平均场描述--用于微电子技术的铁电薄膜；由高速变温扫描隧道显微镜确定的金属蚀刻反应的原子尺度机制。该设备还将提高工程教学的质量，并扩大耶鲁大学许多工程课程的范围，包括材料科学、材料微结构开发、材料的机械行为、几个与材料相关的实验室课程和本科生高级研究项目。

Tong 9700327 The Departments of Mechanical Engineering, Electrical Engineering, and Chemical Engineering at Yale University will purchase a high performance, low vacuum scanning electron microscope equipped with instrumented thermal and mechanical loading stages. This system will provide new engineering research capabilities and education opportunities currently unavailable at Yale and will be used primarily to support research projects in science and engineering, including in particular, Thin film coatings and surface roughening of aluminum alloys-, Thermal fatigue reliability and micro-level constitutive description of solder joints; Reliable metallizations for high temperature semiconductor devices; Non-mean-field description of grain growth-, Ferroelectric thin films for applications in microelectronics; Atomic-scale mechanisms of metal etching reactions determined by high-speed variable temperature scanning tunneling microscopy. The equipment will also enhance the quality of engineering teaching and broaden the scope of many engineering courses at Yale, including Materials Science, Microstructural Development in Materials, Mechanical Behavior of Materials, several materials related laboratory sessions, and undergraduate senior research projects.