International Research Fellow Awards: Three-Dimensional Laser Chemical Vapor Deposition of Superconducting Microelectromechanical Devices

麦克斯韦9703934 国际研究员奖励计划使美国科学家和工程师能够在国外进行三到二十四个月的研究。该计划的奖项提供了联合研究的机会，以及使用国外独特或互补的设施，专业知识和实验条件。 该奖项将支持为期六个月的博士后研究访问博士。路易斯安那理工大学的麦克斯韦与瑞典乌普萨拉大学的马茨·博曼博士合作。 该项目涉及激光诱导化学气相沉积（LCVD）的研究，特别是使用LCVD制造三维微机电系统（MEMS）。 很少有传统的微机械加工工艺能够生产高度三维的MEMS器件。 三维LCVD（3D-LCVD）是热解气相沉积的一种模式，其中可以产生高纵横比的微结构。使用3D-LCVD，研究人员计划制造三维微电感器，超导微电感器和线圈，这些线圈将用于测试MEMS器件中激光沉积Ni-Ti形状记忆致动器的可行性。Boman博士是第一个通过3D-LCVD生产复杂形状和有用器件的人，麦克斯韦博士是第一个在3D-LCVD过程中展示生长速率反馈控制的人，这允许精确、连续地控制分层和自由形式的生长。乌普萨拉大学拥有世界上设备最好的3D-LCVD实验室。 ***

9703934 Maxwell The International Research Fellow Awards Program enables U.S. scientists and engineers to conduct three to twenty four months of research abroad. The program's awards provide opportunities for joint research, and the use of unique or complementary facilities, expertise and experimental conditions abroad. This award will support a six-month postdoctoral research visit by Dr. James L. Maxwell of Louisiana Tech University to work with Dr. Mats Boman at Uppsala University in Sweden. This project involves the study of laser-induced chemical vapor deposition (LCVD) and, in particular, the use of LCVD to manufacture three-dimensional micro electro mechanical systems (MEMS). Few traditional micromachining processes are capable of producing highly-three-dimensional MEMS devices. Three-dimensional LCVD (3D-LCVD) is a mode of pyrolytic vapor deposition where high-aspect ratio microstructures can be generated. Using 3D-LCVD, the researchers plan to fabricate a three-dimensional micro- inductor, a superconducting micro-inductor, and coils which will be used to test the feasibility of laser-deposited Ni- Ti shapememory actuators in MEMS devices. Dr. Boman was the first to produce complex shapes and useful devices via 3D- LCVD and Dr. Maxwell was the first to demonstrate feedback control of growth rates during 3D-LCVD which allows precise, continual control of layered and freeform growth. The University of Uppsala has the best equipped laboratory for 3D-LCVD in the world. ***