Electrostatic Bearing for Salient-Pole Micromotors

9711106加弗里克，除具体目标摘要外，这一订正提案的项目说明和工作说明与原提案ECS-9711106中的项目说明和工作说明基本相同。与预算削减一致，现在的目标包括演示微机械旋转质量陀螺仪的混合版本；但已经取消了制造完全单片陀螺仪的承诺。混合陀螺仪的性能将不会达到单片器件的全部潜力，但混合器件足以进行概念验证，并将成为继续研究微电机技术和应用的极佳工具。经修订的目标和意义说明如下。目的和意义拟议研究项目的总体目标是研究微电机在实际系统中应用的关键技术：控制电子、封装(工艺集成)和可靠性。工作的重点是静电轴承，它专门解决了磨损问题。一个微机械、旋转质量陀螺仪将作为先进技术的展示。在实现这些主要目标的过程中，通过利用闭环控制电子学进行的测量和实验，将增加我们对微电机的了解。将开发新型微电机的分析模型，并进行实验验证。将开发模拟模型，以帮助微电机未来的应用。这个为期三年的项目的具体目标如下：1)具有静电轴承的凸极微电机的详细控制算法；2)适合与微电机单片集成的电路实现；3)制造表面微加工可悬浮磁盘和微电机的制造工艺；4)具有静电轴承的液压闭环系统，其功能类似于旋转质量陀螺仪；这些目标的实现将导致电动系统比目前实现的更快、更小。潜在的应用领域广泛，包括汽车、消费、工业、医疗和军事。***

9711106 Garverick The project description and work statement for this revised proposal is essentially the same as that stated in the original proposal, ECS-9711106, with the exception of the summary of specific objectives. Consistent with the reduction in budget, the objectives now include the demonstration of a hybrid version of a micromachined, rotating mass gyroscope; but the commitment to fabricating a fully monolithic gyroscope has been eliminated. The performance of the hybrid gyroscope will not reach the full potential of a monolithic device, but the hybrid device is adequate for proof of concept and will serve as an excellent vehicle for continued investigation of micromotor technology and application. The revised statement of Objectives and Significance is given below. Objectives and Significance The general objective of the proposed research project is to investigate the issues and advance the technologies that are key to the application of micromotors in real-world systems: control electronics, packaging (process integration), and reliability. The focus of the effort is the electrostatic bearing which specifically addresses the issue of wear. A micromachined, rotating mass gyroscope will serve as demonstration of the advanced technologies. In the process of achieving these primary objectives, our understanding of micromotors will be increased by virtue of the measurements and experiments made possible by the closed-loop control electronics. Analytical models for the new micromotors will be developed and experimentally verified. Simulation models will be developed to aid future application of the micromotors. Specific objectives for the three-year project are as follows: 1) a detailed control algorithm for the salient-pole micromotor with electrostatic bearing; 2) a circuit implementation that is suitable for monolithic integration with the micromotor; 3) a fabrication process for making surface-micromachined levitatable discs and micromotors; 4) a hybri d, closed -loop system with electrostatic bearing that functions as a rotating mass gyroscope; The achievement of these objectives will lead to motorized systems which are significantly faster and smaller than presently realizable. Potential applications areas are widespread, including automotive, consumer, industrial, medical, and military. ***