Electrostatic Bearing for Salient-Pole Micromotors

凸极微电机静压轴承

• 批准号: 9711106
• 负责人: Steven Garverick
• 金额: $ 26.07万
• 依托单位: Case Western Reserve University
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1997
• 资助国家: 美国
• 起止时间: 1997-09-15 至 2001-02-28
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9711106&HistoricalAwards=false
• 关键词: Electrostatic; Bearing; Salient; Pole; Micromotors

9711106 Garverick The project description and work statement for this revised proposal is essentially the same as that stated in the original proposal, ECS-9711106, with the exception of the summary of specific objectives. Consistent with the reduction in budget, the objectives now include the demonstration of a hybrid version of a micromachined, rotating mass gyroscope; but the commitment to fabricating a fully monolithic gyroscope has been eliminated. The performance of the hybrid gyroscope will not reach the full potential of a monolithic device, but the hybrid device is adequate for proof of concept and will serve as an excellent vehicle for continued investigation of micromotor technology and application. The revised statement of Objectives and Significance is given below. Objectives and Significance The general objective of the proposed research project is to investigate the issues and advance the technologies that are key to the application of micromotors in real-world systems: control electronics, packaging (process integration), and reliability. The focus of the effort is the electrostatic bearing which specifically addresses the issue of wear. A micromachined, rotating mass gyroscope will serve as demonstration of the advanced technologies. In the process of achieving these primary objectives, our understanding of micromotors will be increased by virtue of the measurements and experiments made possible by the closed-loop control electronics. Analytical models for the new micromotors will be developed and experimentally verified. Simulation models will be developed to aid future application of the micromotors. Specific objectives for the three-year project are as follows: 1) a detailed control algorithm for the salient-pole micromotor with electrostatic bearing; 2) a circuit implementation that is suitable for monolithic integration with the micromotor; 3) a fabrication process for making surface-micromachined levitatable discs and micromotors; 4) a hybri d, closed -loop system with electrostatic bearing that functions as a rotating mass gyroscope; The achievement of these objectives will lead to motorized systems which are significantly faster and smaller than presently realizable. Potential applications areas are widespread, including automotive, consumer, industrial, medical, and military. ***

9711106 Garverick本修订提案的项目说明和工作说明与原始提案ECS-9711106中所述基本相同，但具体目标摘要除外。 与预算的减少相一致，现在的目标包括演示微机械旋转质量陀螺仪的混合版本;但制造全单片陀螺仪的承诺已被取消。 混合陀螺仪的性能不会达到单片器件的全部潜力，但混合器件足以证明概念，并将作为继续研究微电机技术和应用的优秀工具。 修订后的目标和意义陈述如下。 目标和意义 拟议研究项目的总体目标是调查问题，并推进微电机在现实世界系统中应用的关键技术：控制电子，封装（过程集成）和可靠性。 工作的重点是静电轴承，专门解决磨损问题。 一个微加工的旋转质量陀螺仪将作为先进技术的示范。 在实现这些主要目标的过程中，我们对微电机的理解将通过闭环控制电子设备的测量和实验来增加。 新的微电机的分析模型将开发和实验验证。 仿真模型将被开发，以帮助未来的应用微电机。 三年期项目的具体目标如下： 1)静电轴承凸极微电机的详细控制算法; 2)适合于与微电机单片集成的电路实现; 3)一种制造表面微机械悬浮盘和微马达的制造工艺; 4)具有静电轴承的混合闭环系统，其功能如同旋转质量陀螺仪; 这些目标的实现将导致比目前可实现的更快和更小的机动化系统。 潜在的应用领域非常广泛，包括汽车、消费品、工业、医疗和军事。 ***