Plasma Modifications by Electron Impact Dissociation

在这个由美国国家科学基金会/美国能源部基础等离子体科学与工程伙伴关系下的化学部门和化学与传输系统部门支持的项目中，Cosby将测量电子离解阈值和200 eV之间电子离解能量对等离子体很重要的分子和自由基的电子碰撞离解截面。将确定一些小分子和自由基的绝对横截面、产物平动能分布和产物鉴定，包括CFx、NFx、SiFx、BFx（其中x = 1-3）、BCl2、BCl3、NO、N2O、SO和SO2。测量将在交叉电子束快速中性束装置中进行。等离子体用于处理电子、航空航天、汽车、钢铁、生物医学和有毒废物管理行业的关键材料。因此，能够描述等离子体及其与材料的复杂相互作用是很重要的。该项目收集的数据将为等离子体模型提供输入，这将允许半导体制造和其他领域使用的处理步骤得到改进和优化。

In this project supported by the Chemistry Division and the Division of Chemical and Transport Systems under the NSF/DOE Partnership in Basic Plasma Science and Engineering, Cosby will measure electron-impact dissociation cross sections of molecules and radicals important for plasmas at electron energies between the dissociation threshold and 200 eV. Absolute cross sections, product translational energy distributions, and product identifications will be determined for a number of small molecules and radicals, including CFx, NFx, SiFx, BFx (where x = 1-3), BCl2, BCl3, NO, N2O, SO, and SO2. The measurements will be made in a crossed electron beam-fast neutral beam apparatus. Plasmas are used to process critical materials in the electronics, aerospace, automotive, steel, biomedical, and toxic waste management industries. Therefore, it is important to be able to describe a plasma and its complex interactions with materials. The data gathered in this project will provide input into models of plasma which will allow the processing steps used in semiconductor fabrication and other areas to be improved and optimized.