Investigation of Diamond-Forming Flames Using Advanced Laser Diagnostics and Laser Enhancement of the Deposition Rate

摘要- Lucht和Glumac 这是一个详细的调查，实验和理论，在低压金刚石形成火焰的化学和运输过程。 重点是在沉积衬底附近的自由基物种的温度和浓度的配置文件。 广泛的测量的温度和自由基物种H（原子氢），OH（羟基），C（原子碳），CH（次甲基）的范围内的火焰压力，化学计量，和总质量流量进行比较，并与数值火焰模型。 实验工作在Robert Lucht博士的实验室进行，该实验室拥有必要的低压火焰装置和激光诊断设备;建模工作在Nick Glumac博士的实验室进行。 温度测量使用氢相干反斯托克斯拉曼光谱（H2汽车）。 诊断研究的重点是解决近衬底区域的梯度。 火焰模型，已成功地应用于其他火焰合成环境中使用。 火焰温度分布和工艺参数被用作输入，该模型预测的物种配置文件，实验和计算之间的差异进行了研究与灵敏度分析，探讨动力学和传输速率的影响。

Abstract - Lucht and Glumac This is a detailed investigation, both experimental and theoretical, of the chemistry and transport processes in low-pressure diamond-forming flames. The focus is on profiles of temperature and concentrations of radical species near the deposition substrate. Extensive measurements of temperature and of the radical species H (atomic hydrogen), OH (hydroxyl), C (atomic carbon), and CH (methyne) are performed for a range of flame pressures, stoichiometries, and total mass flow rates and are compared with numerical flame models. The experimental work is performed in Dr. Robert Lucht's laboratory which has the necessary low-pressure flame apparatus and laser diagnostic equipment; the modeling is done in Dr. Nick Glumac's laboratory. Temperature measurements are made using hydrogen coherent anti-Stokes Raman spectroscopy (H2 CARS). The emphasis in the diagnostic studies is in resolving the gradients in the near-substrate region. A flame model that has been applied successfully in other flame synthesis environments is used. The flame temperature profile and process parameters are used as input, and the model predicts the species profiles; differences between experiment and computation are investigated with a sensitivity analysis to explore the influences of kinetic and transport rates.