SBIR Phase I: Low Voltage High Resolution Scanning Electron Microscope

SBIR 第一阶段：低压高分辨率扫描电子显微镜

• 批准号: 9760987
• 负责人: Albert Crewe
• 金额: $ 7.52万
• 依托单位: KPY2, Inc.
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1998
• 资助国家: 美国
• 起止时间: 1998-01-01 至 1998-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9760987&HistoricalAwards=false
• 关键词: SBIR; Phase; Low; Voltage; Resolution

*** 9760987 This Small Business Innovation Research Phase I project is for the construction of a low voltage SEM which uses a magnetic dipole lens as the objective lens. The theoretical performance of this design is far superior to any lens in current use. The lens consists of a permanently magnetized sphere. New materials are now available which make it feasible to use spheres of only a few mm in diameter and yet achieve a resolution superior to anything commercially available. Using this concept, we are in a position to fabricate SEMs which are lower in cost and higher in performance than any other instruments. The completed microscope will be used at research and development facilities for the imaging of biological specimens at high resolution. The microscope will also be extremely valuable for semiconductor chip inspection. ***

* 9760987 本小企业创新研究第一期项目是为了建造一个低电压SEM，它使用磁偶极子透镜作为物镜透镜。 这种设计的理论性能远远上级目前使用的任何透镜。 透镜由永久磁化的球体组成。 现在有了新的材料，可以使用直径仅为几毫米的球体，但其分辨率却比任何商用的球体都要高上级 available.利用这一概念，我们能够制造出比任何其他仪器成本更低、性能更高的SEM。 完成后的显微镜将用于研究和开发设施，以高分辨率对生物标本进行成像。 该显微镜对于半导体芯片检测也将是极其有价值的。 ***