Experiments With Dipole and Monopole Lenses for an SEM

用于 SEM 的偶极子和单极子透镜实验

• 批准号: 0096536
• 负责人: Albert Crewe
• 金额: $ 75.3万
• 依托单位: University of Chicago
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2002
• 资助国家: 美国
• 起止时间: 2002-03-15 至 2007-02-28
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0096536&HistoricalAwards=false
• 关键词: Experiments; Dipole; Monopole; Lenses; SEM

An Instrument development grant has been awarded to Albert Crewe of the University of Chicago to complete, test, and demonstrate a new and originalscanning electron microscope (SEM), using a novel lens system, whose expectedperformance characteristics far exceed those of existing instruments. It is a dedicated low voltage, high resolution instrument that incorporates a permanent magnet lens, placed below the specimen. Such lenses have not been used previously but they show promise of permitting a considerable increase in resolution. The special value of these lenses are that they allow the use of very small focal lengths with correspondingly low aberrations. This makes it especially valuable for use with low accelerating voltages, although thelenses are not limited to this area. A second advantage is that simplified and more versatile column designs are allowed due to the post-specimen lens location. A third advantage is that the anticipated cost of the entire instrument, if made commercially, should be about half that of current high resolution scanning electron microscopes. Finally, the shape of the lens makes it easy to provide a large tilt angle for the specimen. The project involves the training of a number of students who will gain invaluable instrument design and development experience.

芝加哥大学的阿尔伯特克鲁获得了一笔仪器开发赠款，用于完成、测试和演示一种新的原始扫描电子显微镜（SEM），该显微镜使用一种新型透镜系统，其预期性能特性远远超过现有仪器。这是一个专用的低电压，高分辨率的仪器，包括一个永久磁铁透镜，放置在样品下面。 这种透镜以前没有使用过，但它们显示出允许分辨率显著增加的前景。这些镜头的特殊价值在于它们允许使用具有相应低像差的非常小的焦距。这使得它在低加速电压下使用特别有价值，尽管thelenses并不局限于这一领域。第二个优点是，由于样本后透镜位置，允许简化且更通用的柱设计。第三个优点是，整个仪器的预期成本，如果商业化，应该是目前的高分辨率扫描电子显微镜的一半左右。最后，透镜的形状使得容易为样品提供大的倾斜角。该项目涉及培训一些学生，他们将获得宝贵的仪器设计和开发经验。