SBIR Phase I: Novel Methods for Polysilicon Deposition Using Silicon Tubes

这个小企业创新研究（SBIR）第一阶段项目将探索一种使用硅（Si）管生产多晶硅的新技术，多晶硅是电子、光伏、微机电系统（MEMS）和许多其他设备的关键材料。目前世界范围内多晶硅材料的短缺可能会在未来变得严重。块状多晶硅目前是通过化学气相沉积在热薄晶体硅棒上的硅来生产的。棒材的直径随着沉积的增加而增加，但由于表面积小，初期过程非常缓慢。我们将研究两种不同的硅管沉积技术。第一种方案通过允许在管的内外表面沉积（通过简单的改造），将使产量增加15-20%，而第二种方案将导致一个更简单的反应堆设计，大大降低了能量需求，更好的控制和更高的产量。第一阶段将通过理论研究、设计研究和工业测试来确定这两个概念的相对可行性。多晶硅在半导体和太阳能行业的潜在商业应用

*** Chandra 9761291 This Small Business Innovation Research (SBIR) Phase I project will explore a novel technique of using silicon (Si) tubes for the production of polycrystalline silicon, a material critical for electronics, photovoltaics, micro-electromechanical systems (MEMS), and many other devices. A current worldwide shortage of polysilicon material may become acute in the future. Bulk polysilicon is currently produced by chemical vapor deposition of Si on a hot thin crystalline silicon rod. The diameter of the rod increases with the deposition, but the process is very slow in the beginning because of small surface area. Two different Si tube-based deposition techniques will be examined. The first will increase yield by 15-20% by allowing deposition on both inner and outer surfaces of the tube (with simple retrofitting), whereas the second scheme will lead to a much simpler reactor design with a much reduced energy requirement, better control, and higher yield. Phase I will establish the relative feasibility of the two concepts through theoretical research, design studies, and industrial testing. Potential commercial applications are expected production of polysilicon in the semiconductor and solar industries ***