Planning Grant to Establish an Industry/University Cooperative Research Center for Microcontamination and Defect Control

这项计划资助伦斯勒理工学院召开一次工业/大学会议，以确定该大学成为亚利桑那大学微污染和缺陷控制工业/大学合作研究中心相关研究基地的可行性和可行性。中心的研究项目包括：1)界面的椭圆偏振光谱研究，2)CMP过程中的缺陷控制，3)PECVD反应器中的颗粒跟踪，4)基于膜的再处理器对氢氟酸蚀刻溶液的超净化，5)CMP后清洗，6)改进BEOL产率模型的缺陷分析，7)等离子体过程诱导粒子形成的控制，8)用侧向力显微镜对CMP表面缺陷进行表征。首席研究员和他的同事是各自领域公认的专家，完全有资格管理这项计划拨款。

ABSTRACT EEC-9802218 ROSE This planning award funds the Rensselaer Polytechnic Institute to hold an industry/university meeting to determine the feasibility and viability of the university becoming a research site associated with the University of Arizona's Industry/University Cooperative Research Center for Microcontamination and Defect Control. Research projects envisioned to augment the Center's research agenda are 1) Spectroscopic Ellipsometry Studies of Interfaces, 2) Defect Control during CMP, 3) Tracking Particulates in a PECVD Reactor, 4) Ultrapurification of Hydrofluric Acid Etching Solutions using Membrane Based Reprocessor, 5) Post-CMP Cleaning, 6) Defect Analysis for Improved BEOL Yield Modeling, 7) Control of Plasma Process-Induced Particle Formation, and 8) Defect Characterization of CMP Surfaces using Lateral Force Microscope. The Principal Investigator and his colleagues are recognized experts in their fields and are well qualified to run this planning grant.