Planning Grant to Establish an Industry/University Cooperative Research Center for Microcontamination and Defect Control

摘要EEC-9802218 ROSE该计划奖资助伦斯勒理工学院举办一次行业/大学会议，以确定该大学成为亚利桑那大学微污染和缺陷控制行业/大学合作研究中心的可行性和可行性。预计将加强该中心研究议程的研究项目包括1)界面的椭圆偏振光谱研究，2)化学机械抛光过程中的缺陷控制，3)在PECVD反应器中跟踪颗粒，4)使用基于膜的后处理器对氢氟酸蚀刻溶液进行超净化，5)化学机械抛光后的清洗，6)改进的BEOL成品率模型的缺陷分析，7)等离子体工艺诱导的颗粒形成的控制，以及8)使用侧向力显微镜对化学机械抛光表面的缺陷进行表征。首席调查员和他的同事都是各自领域的公认专家，完全有资格管理这项规划补助金。

ABSTRACT EEC-9802218 ROSE This planning award funds the Rensselaer Polytechnic Institute to hold an industry/university meeting to determine the feasibility and viability of the university becoming a research site associated with the University of Arizona's Industry/University Cooperative Research Center for Microcontamination and Defect Control. Research projects envisioned to augment the Center's research agenda are 1) Spectroscopic Ellipsometry Studies of Interfaces, 2) Defect Control during CMP, 3) Tracking Particulates in a PECVD Reactor, 4) Ultrapurification of Hydrofluric Acid Etching Solutions using Membrane Based Reprocessor, 5) Post-CMP Cleaning, 6) Defect Analysis for Improved BEOL Yield Modeling, 7) Control of Plasma Process-Induced Particle Formation, and 8) Defect Characterization of CMP Surfaces using Lateral Force Microscope. The Principal Investigator and his colleagues are recognized experts in their fields and are well qualified to run this planning grant.