Microelectronics Education Enhancement Program

微电子教育强化计划

• 批准号: 9812848
• 负责人: Thomas Stoebe
• 金额: $ 40万
• 依托单位: University of Washington
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1998
• 资助国家: 美国
• 起止时间: 1998-10-01 至 2002-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9812848&HistoricalAwards=false
• 关键词: Microelectronics; Education; Enhancement; Program

Microtechnology is a rapidly expanding field that is growing from its roots in integrated circuit fabrication to a broad array of applications that range from biotechnology to high-density microfabrication. This CRCD proposal entitled, "Microelectronics Education Enhancement Program," addresses this important field of microtechnology by providing students with opportunities for education and hands-on experience in subjects that define the broad microprocessing technology area.The goal of this program is to introduce and develop a range of microtechnology courses from basic science to applications, including laboratory and research opportunities for students, beginning in the sophomore year and extending through graduate research. This will be accomplished by introducing students to the multi-disciplinary breadth of microtechnological theory and application using a new set of courses:A new sophomore course that will introduce students to the materials properties of Si and it applications in microelectronics and microelectromechanical systems(MEMS);A junior year laboratory course, designed to provide hands-on experience in lithography and etching, and in developing and characterizing simple structures;A reconfigured senior level course on semiconductor processing along with related courses in electronic materials and device packaging; and A process integration course at the graduate level that will act as the capstone course for students interested in semiconductor applications, to accompany an existing course that serves as a capstone in the MEMS area.These courses will be accompanied by a full range of research opportunities for both undergraduate and graduate students in the area of microtechnology, from MEMS to advanced microprocessor research.

微技术是一个快速扩展的领域，从集成电路制造的根源发展到从生物技术到高密度微制造的广泛应用。 该CRCD建议题为“微电子教育增强计划”，通过为学生提供定义广泛微处理技术领域的主题的教育和实践经验的机会，解决了微技术的这一重要领域。该计划的目标是介绍和开发从基础科学到应用的一系列微技术课程，包括为学生提供实验室和研究机会，从大二开始，一直延伸到研究生研究。 这将通过向学生介绍微技术理论和应用的多学科广度使用一套新的课程来完成：一个新的大二课程，将向学生介绍硅的材料特性及其在微电子和微机电系统（MEMS）中的应用;一个大三的实验室课程，旨在提供光刻和蚀刻的实践经验，并在开发和表征简单的结构;半导体加工高级课程与电子材料和器件封装相关课程的重新组合沿着和一个研究生水平的工艺集成课程，将作为对半导体应用感兴趣的学生的顶点课程，伴随着现有的课程，作为在MEMS领域的顶点。这些课程将伴随着一个全面的研究机会，本科生和研究生在微技术领域，从MEMS到先进的微处理器研究。