Chemical and Physical Rate Processes in GaN Chemical Vapor Deposition

GaN 化学气相沉积中的化学和物理速率过程

基本信息

  • 批准号:
    9817925
  • 负责人:
  • 金额:
    $ 19.01万
  • 依托单位:
  • 依托单位国家:
    美国
  • 项目类别:
    Standard Grant
  • 财政年份:
    1999
  • 资助国家:
    美国
  • 起止时间:
    1999-04-01 至 2003-03-31
  • 项目状态:
    已结题

项目摘要

In this study detailed gas-phase kinetics for the production of GaN films in a chemical vapor deposition (CVD) process will be developed. The focus will be on the homogeneous gas-phase reactions that occur during CVD of GaN from NH3, and trimethylgallium and from NH3 and triethylgallium. Two experimental methods will be used: (1) laser powered homogeneous pyrolysis will be employed for the gas-phase kinetics and (2) optical imaging of vertical concentration profiles above growth surfaces will be used for investigations of important growth species. Reactive intermediate concentration profiles will be imaged using laser induced fluorescence. This experimental program will be complemented with ab initio molecular orbital calculations in combination with transition state theories to estimate rate coefficients for less important reactions not determined in the experimental studies. The gas-phase mechanism developed in this project will be combined with literature information on surface reactions and incorporated into a CVD reactor model. These studies are relevant to the development of GaN light emitting diodes and diode lasers for lighting, for optical data storage and for other applications. GaN is grown commercially by CVD; however, most techniques have been developed by empirical means. This study should contribute to a fundamental understanding of the basic processes.
在这项研究中,将建立详细的气相动力学在化学气相沉积(CVD)过程中生产GaN薄膜。重点将集中在在CVD过程中从NH3和三甲基镓以及从NH3和三乙基镓中生成GaN时发生的均相气相反应。将使用两种实验方法:(1)激光驱动的均相热解将用于气相动力学;(2)生长表面上方的垂直浓度分布的光学成像将用于研究重要的生长物种。反应中间浓度分布将使用激光诱导荧光成像。这个实验程序将与从头算分子轨道计算相结合,结合过渡态理论来估计实验研究中未确定的不太重要的反应的速率系数。本项目中开发的气相机理将与有关表面反应的文献信息相结合,并纳入CVD反应器模型。这些研究与用于照明、光学数据存储和其他应用的GaN发光二极管和二极管激光器的开发有关。GaN的商业生长是通过CVD进行的;然而,大多数技术都是通过经验方法开发的。这项研究应有助于从根本上理解这些基本过程。

项目成果

期刊论文数量(0)
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会议论文数量(0)
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Robert Carr其他文献

Penetration of clarithromycin into middle ear fluid of children with acute otitis media.
克拉霉素渗入急性中耳炎儿童中耳液。
Selective Common and Uncommon Imaging Manifestations of Blunt Nonaortic Chest Trauma: When Time is of the Essence
  • DOI:
    10.1067/j.cpradiol.2014.08.004
  • 发表时间:
    2015-03-01
  • 期刊:
  • 影响因子:
  • 作者:
    Rola Altoos;Robert Carr;Jonathan Chung;Eric Stern;Dipti Nevrekar
  • 通讯作者:
    Dipti Nevrekar
Dynamics Modelling and Simulation of SPDM Operations Part II: SPDM Handling the IEA Battery
  • DOI:
    10.1016/s1474-6670(17)38404-5
  • 发表时间:
    1998-10-01
  • 期刊:
  • 影响因子:
  • 作者:
    Ou Ma;Robert Carr
  • 通讯作者:
    Robert Carr
Decreasing power consumption with energy efficient data aware strategies
通过节能数据感知策略降低功耗
  • DOI:
    10.1016/j.future.2012.12.016
  • 发表时间:
    2013
  • 期刊:
  • 影响因子:
    0
  • 作者:
    Susan V. Vrbsky;Jeffrey M. Galloway;Robert Carr;Rahul Nori;David Grubic
  • 通讯作者:
    David Grubic
Dynamics Modelling and Simulation of SPDM Operations Part I: SPDM Handling the 6B Avionics Box
  • DOI:
    10.1016/s1474-6670(17)38403-3
  • 发表时间:
    1998-10-01
  • 期刊:
  • 影响因子:
  • 作者:
    Ou Ma;Robert Carr
  • 通讯作者:
    Robert Carr

Robert Carr的其他文献

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{{ truncateString('Robert Carr', 18)}}的其他基金

XXII Informal Conference on Photochemistry; Minneapolis, Minnesota; June 16-21, 1996
第二十二届光化学非正式会议;
  • 批准号:
    9632489
  • 财政年份:
    1996
  • 资助金额:
    $ 19.01万
  • 项目类别:
    Standard Grant
Global Optimization of Process Models Incorporating Detailed Chemical Kinetics Mechanisms
结合详细化学动力学机制的过程模型的全局优化
  • 批准号:
    9504827
  • 财政年份:
    1995
  • 资助金额:
    $ 19.01万
  • 项目类别:
    Continuing Grant
Laser Equipment for Fundamental Studies of Chemical Processes
用于化学过程基础研究的激光设备
  • 批准号:
    8604865
  • 财政年份:
    1986
  • 资助金额:
    $ 19.01万
  • 项目类别:
    Standard Grant
Engineering Research Equipment Grant: Laser Equipment for CVD Studies
工程研究设备补助金:用于 CVD 研究的激光设备
  • 批准号:
    8506570
  • 财政年份:
    1985
  • 资助金额:
    $ 19.01万
  • 项目类别:
    Standard Grant
Resource Based Simulation Model for Construction Processes
基于资源的施工过程仿真模型
  • 批准号:
    8409939
  • 财政年份:
    1984
  • 资助金额:
    $ 19.01万
  • 项目类别:
    Continuing Grant
Engineering Research Equipment: Optoacoustic Spectroscopy And Thermal Lensing
工程研究设备:光声光谱和热透镜
  • 批准号:
    8305419
  • 财政年份:
    1983
  • 资助金额:
    $ 19.01万
  • 项目类别:
    Standard Grant
Workshop on Construction Engineering Basic Research
建筑工程基础研究研讨会
  • 批准号:
    8209538
  • 财政年份:
    1982
  • 资助金额:
    $ 19.01万
  • 项目类别:
    Standard Grant
Multiphoton Infrared Photochemical Reaction Engineering
多光子红外光化学反应工程
  • 批准号:
    8023180
  • 财政年份:
    1981
  • 资助金额:
    $ 19.01万
  • 项目类别:
    Standard Grant
Engineering Specialized Research Equipment: Studies in Photochemical Reaction Engineering
工程专业研究设备:光化学反应工程研究
  • 批准号:
    7911586
  • 财政年份:
    1979
  • 资助金额:
    $ 19.01万
  • 项目类别:
    Standard Grant

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面向智能电网基础设施Cyber-Physical安全的自治愈基础理论研究
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