Laser Equipment for Fundamental Studies of Chemical Processes

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Laser diagnostics are used for the direct detection of atoms and small free radicals in gas phase reaction system. Highly vibrationally excited polyatomic molecules are difficult to investigate because their spectra may lack enough structure to permit unambiguous identification. This direct detection technique will be used to obtain kinetic data for these species. Such information would be very useful in modeling gas phase reactions in, for example, thin film prduction in microelectronics processing by chemical vapor deposition.