Laser Equipment for Fundamental Studies of Chemical Processes

用于化学过程基础研究的激光设备

• 批准号: 8604865
• 负责人: Robert Carr
• 金额: $ 6.53万
• 依托单位: University of Minnesota-Twin Cities
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1986
• 资助国家: 美国
• 起止时间: 1986-08-01 至 1988-09-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=8604865&HistoricalAwards=false
• 关键词: Laser; Equipment; Fundamental; Studies; Chemical

Laser diagnostics are used for the direct detection of atoms and small free radicals in gas phase reaction system. Highly vibrationally excited polyatomic molecules are difficult to investigate because their spectra may lack enough structure to permit unambiguous identification. This direct detection technique will be used to obtain kinetic data for these species. Such information would be very useful in modeling gas phase reactions in, for example, thin film prduction in microelectronics processing by chemical vapor deposition.

激光诊断用于直接检测原子和小的 气相反应体系中的自由基。 高振动 激发的多原子分子很难研究，因为它们 光谱可能缺乏足够的结构以允许明确的识别。 这种直接检测技术将用于获得动力学数据， 这些物种。 这样的信息将是非常有用的建模气体 例如，薄膜生产中的相反应， 化学气相沉积微电子工艺。