Integrated Optical Monitoring: Enabling Technology for MEMS Feedback Control

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9821018HornakThis research project will design, prototype, and experimentally evaluate both integrated guided wave and free-space micro-optical systems for achieving process compatible, integrated optical monitoring (IOM) for in-situ metrology, state feedback, and control of MEMS. Leveraging the knowledge base developed within the optical interconnect research community, polymer integrated optical waveguide and planar/folded diffractive micro-optics technologies will be defined for routine insertion of optics within surface micromachined (SMM) MEMS. Development and evaluation of IOM based on these technologies will be accomplished within selected testbeds fabricated using established SMM foundries (e.g. MUMPS, Sandia MDL) in order to facilitate the acceptance and use of the developed IOM techniques by the MEMS community. Testbeds will consist of "standard cell" MEMS with generic micromechanical functions as well as a complex application specific MEMS comprised of coupled generic devices. Leveraging an ongoing formal collaboration, the Sandia Microengine will serve as the application specific testbed. Closed-loop control systems using IOM-based state feedback will be developed for generic testbed MEMS and these systems then used as building blocks in the control of the Microengine application specific testbed.***