Thin-Film Femtosecond Thermoreflectance Analysis for Sensor Technology

用于传感器技术的薄膜飞秒热反射分析

• 批准号: 9908372
• 负责人: Pamela Norris
• 金额: $ 16.12万
• 依托单位: University of Virginia Main Campus
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1999
• 资助国家: 美国
• 起止时间: 1999-09-15 至 2003-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9908372&HistoricalAwards=false
• 关键词: Thin; Film; Femtosecond; Thermoreflectance; Analysis

This award is to support the further development of non-contact methods for the thermal characterization of thin films and the exploration of the utility of this information in sensing critical microstructural properties such as: thermal diffusivity, grain boundary impedance of electron mobility, thermal boundary resistance, electron phonon energy coupling, acoustic velocity, and thickness. This will be done utilizing a femtosecond pump/probe thermoreflectance technique. This thin film characterization method relies on the fact that the reflectivity of certain materials is a function of both temperature and strain, and by monitoring the reflective response to the deposition of radiation by an ultrashort laser pulse, the thermal and mechanical properties can be extrapolated simultaneously. To compliment the empirical approach, several advancements have been made toward a strong theoretical understanding of nonequilibrium heating and the effects on the optical properties of metals and semiconductors and further goals have been set towards making computational processes more efficient.This research promises to impact the manufacturing of high-tech materials and devices of national importance, such as opto-electronics, photo-voltaics, and micro-electronics. The theories and techniques developed with this program will form the basis for the development of new nondestructive sensor technologies for process monitoring and control. The proposed work provides an excellent educational environment, by setting goals based in fundamental science with a strong potential impact on industry and by fostering interdisciplinary research teams. The lab will continue its tradition of uniting students from different backgrounds and experiences into a supportive group research environment.

该奖项旨在支持进一步开发用于薄膜热特性的非接触方法，并探索这些信息在传感关键微结构特性方面的实用性，例如：热扩散率，电子迁移率的晶界阻抗，热边界电阻，电子声子能量耦合，声速和厚度。 这将利用飞秒泵浦/探测热反射技术来完成。 这种薄膜表征方法依赖于这样的事实，即某些材料的反射率是温度和应变的函数，并且通过监测超短激光脉冲对辐射沉积的反射响应，可以同时推断热性能和机械性能。 为了补充经验方法，已经取得了一些进展，对非平衡加热和金属和半导体的光学性质的影响的强大的理论理解和进一步的目标已被设定为使计算过程更有效。这项研究有望影响高科技材料和国家重要设备的制造，如光电子，光电子学和微电子学。 该计划开发的理论和技术将成为开发用于过程监测和控制的新型无损传感器技术的基础。 拟议的工作提供了一个良好的教育环境，通过设定基于基础科学的目标，对行业产生强大的潜在影响，并通过培养跨学科的研究团队。 该实验室将继续其团结来自不同背景和经验的学生到一个支持性的小组研究环境的传统。