Planning Grant I/UCRC for Silicon Wafer Engineering Defect Science (SiWEDS) Subcenter

点击翻译按钮获取中文摘要

EEC9908984WeberUniversity of California BerkeleyThe Industry/University Cooperative Research Center (I/UCRC) for Silicon Wafer Engineering Defect Science (SiWEDS), based at North Carolina State University, involves researchers from the University of Arizona, Arizona State University, the Massachusetts Institute of Technology, Stanford University, and the University of California Berkeley. The Center's mission is to create a unique multi-university, multi-company culture in which to address the science and technology issues that are important to the international silicon materials industry in meeting the future requirements of advanced integrated circuit manufacturing.Using the research expertise and equipment available at Berkeley, this partner site will enhance the Center's research in the area of electrical and recombination properties of impurities in silicon and the gettering of these impurities.