GOALI: Studies of Particle Nucleation, Growth and Transport in Advanced Semiconductor Processing Tools

abstractcts - 9909563泵房麦克默里，S.L.格希克，S.L.坎贝尔和U.R.科尔沙根，明尼苏达大学。目的是研究与半导体加工工具相关的高密度等离子体中污染物颗粒的成核、生长和传输。在气溶胶、等离子体物理和化学方面的实验和建模贡献将包括在开发新一代无污染工艺和加工工具的总体方法中。明尼苏达大学将与四个工业伙伴合作：应用材料公司（加工工具制造商）、SEMATECH公司（代表半导体设备制造商）、MicroTerm公司（小企业公司）和桑迪亚国家实验室（合作研究气溶胶颗粒形成和传输模型）。大学研发的粒子束质谱仪将用于测量高密度等离子体过程中在低压（1-10 mTorr）下5纳米的颗粒尺寸分布。粒子成核和生长的建模将包括复杂的化学，流体流动，热传递，以及静电力和凝固的影响。这是一个学术与行业联络的资助机会（GOALI）项目。如果成功，该研究项目将有助于更好地理解和设计半导体加工环境中的颗粒形成和去除。

AbstractCTS-9909563P.H. McMurry, S.L. Girshick, S.A. Campbell and U.R. Korshagen, U. of MinnesotaD. Jensen, Sematech The purpose is to investigate the nucleation, growth and transport of contaminant particles in high-density plasmas with relevance in semiconductor processing tools. Experimental and modeling contributions in aerosols, plasma physics and chemistry will be included in an overall methodology to develop new generations of contaminant-free processes and processing tools. The University of Minnesota will collaborate with four industrial partners: Applied Materials (manufacturer of processing tools), SEMATECH (representing semiconductor device manufacturers), MicroTerm (small business company), and Sandia National Laboratories (for collaboration in aerosol particle formation and transport modeling). A particle beam mass spectrometer developed in the University will be used to measure particle size distribution down to 5 nm at low pressures (1-10 mTorr) characteristic in high density plasma processes. Modeling the particle nucleation and growth will include complex chemistry, fluid flow, heat transfer, and the effect of electrostatic forces and of coagulation. This is a Grant Opportunity for Academic Liaison with Industry (GOALI) project. If successful, the research project will lead to better understanding and design of particle formation and removal in semiconductor processing environment.