Dynamic Behavior of Microelectromechanical Systems (MEMS) in Liquid Environments

液体环境中微机电系统 (MEMS) 的动态行为

• 批准号: 9978744
• 负责人: Susan Mantell
• 金额: $ 37.5万
• 依托单位: University of Minnesota-Twin Cities
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1999
• 资助国家: 美国
• 起止时间: 1999-09-01 至 2003-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9978744&HistoricalAwards=false
• 关键词: Dynamic; Behavior; Microelectromechanical; Systems; MEMS

The objective of this project is to investigate the motion of simple microelectromechanical systems (MEMS) structures immersed in homogeneous liquids and solid/liquid suspensions. The structures will include beams designed to move normal to solid substrates and 'shuttle' plates designed to slide parallel with the substrates. The influence of geometry, gap height, surface characteristics, and fluid properties on device performance will be examined. 'Start-up' motion will be investigated by quantifying 'spring-back' behavior in beams and shuttles initially deflected by electrical forces. Normal oscillatory motion will be quantified using laser vibrometry. Start-up and oscillatory sliding motion will be observed and quantified by imaging shuttles with a high-frame-rate digital camera. The mechanical quality factor Q and frequency shift will be calculated for the two forms of oscillatory motion. Details of fluid motion will be investigated by visualization and image processing techniques. The experimental results will be compared with existing physical models on friction and lubrication, liquid/solid surface adhesion, and liquid damping forces to elucidate the dominant physical factors responsible for device performance. The results will also be used to test and determine limits in parametric relationships and to suggest design rules for the fabrication of reliable and optimal microscale mechanical devices. This study represents a pioneer investigation of fluid/structure interactions for MEMS devices in liquids. Since such devices are desirable in a variety of industries, the experimental data and analysis will be useful to engineers in many applications. The parametric relationships and design rules will ultimately allow engineers to optimize manufacturing methods and system performance while minimizing costly trial-and-error procedures.

本项目的目的是研究简单微机电系统（MEMS）结构在均质液体和固体/液体悬浮液中的运动。该结构将包括设计用于向固体基材正常移动的梁和设计用于与基材平行滑动的“穿梭”板。几何形状、间隙高度、表面特性和流体特性对设备性能的影响将被检查。“启动”运动将通过量化最初受电力偏转的梁和梭的“回弹”行为来研究。正常的振荡运动将用激光测振仪进行量化。启动和振荡滑动运动将观察和量化成像穿梭与高帧率数码相机。将计算两种振荡运动形式的机械品质因子Q和频移。流体运动的细节将通过可视化和图像处理技术进行研究。实验结果将与现有的摩擦与润滑、液/固表面粘附、液体阻尼力等物理模型进行比较，以阐明影响器件性能的主要物理因素。结果还将用于测试和确定参数关系的限制，并为制造可靠和最佳的微尺度机械设备提出设计规则。这项研究代表了液体中MEMS器件流体/结构相互作用的先驱研究。由于这种装置在各种工业中都是理想的，因此实验数据和分析将对许多应用中的工程师有用。参数关系和设计规则最终将允许工程师优化制造方法和系统性能，同时最大限度地减少昂贵的试错过程。