AFM-assisted, Nanometer-scale Modification of Semiconductor Chips

William A.弗吉尼亚理工大学化学系。Calter，Rochester大学化学系NSF提案9980770; Virginia Tech提案99-1519- 02 AFM辅助的半导体芯片纳米级改性这个工程微系统的目标：“XYZ”芯片项目是开发一种在非常小的尺度上书写的新技术（纳米光刻），并将纳米光刻应用于电极上细胞膜的构建。 酶被安装在原子力显微镜（AFM）力传感器的工作尖端上，并且酶被用于在由显微镜指示的特定位置处执行特定的化学反应。 最初的目标是在保持化学反应性的同时将酶附着到尖端，并合成易于被酶修饰的表面膜。 原子力显微镜也被用来验证写入过程的准确性。 为了保护精细的酶尖，一种具有两个独立探针的AFM正在开发中。 在同一位置，一个探头用于写入，一个探头用于阅读。 酶辅助纳米光刻技术将用于在半导体芯片上制造细胞膜。 支持细胞膜的天然细胞支架将通过AFM酶针尖附着在芯片上，在特定位置进行反应。具有高度空间和化学特异性的写入技术的发展增强了我们制造可重复使用的电子元件和进行并行药物筛选的能力。 开发一种真实的芯片安装膜是制备生物传感器的关键步骤。

William A. Ducker, Department of Chemistry, Virginia TechMichael A. Calter, Department of Chemistry, University of RochesterNSF Proposal 9980770; Virginia Tech Proposal 99-1519-02AFM -assisted, Nanometer-scale Modification of Semiconductor ChipsThe goal of this Engineering Microsystems: "XYZ" on a Chip project is to develop a new technique for writing on a very small scale (nanolithography), and to apply nanolithography to the construction of a cell membrane on an electrode. Enzymes are mounted on the working tip of an Atomic Force Microscope (AFM) force sensor and the enzymes are used to perform a specific chemical reaction at a specific location dictated by the microscope. The initial objectives are to attach enzymes to the tips while maintaining chemical reactivity, and to synthesize a surface film that is easily modified by the enzyme. An AFM is also used to verify the accuracy of the writing process. To protect the delicate enzyme-tip, an AFM that has two separate probes is being developed. One probe is for writing and one is for reading in the same location. The enzyme-assisted nanolithographic technique will be used to fabricate a cell membrane on a semiconductor chip. The natural cell scaffold that supports the cell membrane will be attached to the chip by using the AFM enzyme tip to perform reactions at specific locations.The development of writing techniques with high spatial and chemical specificity enhances our ability to manufacture miniaturize electronic components and to perform parallel drug screening. The development of a realistic chip-mounted membrane is a key step in the preparation of biosensors.