SGER: Guidelines for Computer-Aided-Design of Dynamically Reliable MEMS

SGER：动态可靠 MEMS 计算机辅助设计指南

• 批准号: 0000342
• 负责人: Stephen Senturia
• 金额: --
• 依托单位: Massachusetts Institute of Technology
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2000
• 资助国家: 美国
• 起止时间: 2000-01-01 至 2000-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0000342&HistoricalAwards=false
• 关键词: SGER; Guidelines; Computer; Aided; Design

In recent years, there has been an explosive growth of new process technologies, new device concepts, and new markets for integrated sensors and actuators, also referred to as micro-electro-mechanical systems (MEMS). This growth has led to new challenges for computer-aided-design (CAD) of MEMS, with the ultimate goals being accurate, easy-to-use behavioral models that capture all the essential behavior, and permit predictable design modifications and optimization. This research investigates the lack of design guidelines for reliability with regard to dynamic (shock) loading. Such loading can occur either by choice (for example, MEMS launched on satellites), or by accidental drops onto hard surfaces. There is evidence that the small moveable parts of MEMS devices, such as suspended proof masses in accelerometers, experience fracture from dynamic loading levels which the devices are expected to withstand based on quasi-static loading models. It is hypothesized that the inertia of a packaged MEMS, when subject to even modest acceleration, provides a reservoir of kinetic energy which can then be transferred to the mechanical elements as acoustic waves, and cause fracture due to stress wave loading. This project examines the validity of this hypothesis by using numerical analyses to establish expected behavior. For confirmation, experimental studies of subjecting Si microstructures to stress-wave loading are being made. Modeling procedures to anticipate such failures, and by proper design, prevent them are being developed.

近年来，集成传感器和致动器（也称为微机电系统（MEMS））的新工艺技术、新器件概念和新市场的爆炸性增长。这种增长为MEMS的计算机辅助设计（CAD）带来了新的挑战，最终目标是准确，易于使用的行为模型，这些模型可以捕获所有基本行为，并允许可预测的设计修改和优化。本研究调查缺乏设计准则的可靠性方面的动态（冲击）负载。这种负载可以通过选择（例如，在卫星上发射的MEMS）或意外掉落到硬表面上而发生。有证据表明，MEMS器件的小的可移动部件，例如加速度计中的悬浮检验质量，经历了基于准静态负载模型预期器件能够承受的动态负载水平的断裂。假设封装的MEMS的惯性在经受甚至适度的加速度时提供动能的储存器，该动能然后可以作为声波传递到机械元件，并且由于应力波加载而导致断裂。本计画借由数值分析来建立预期行为，以检验此假设的有效性。为了确认，正在进行使Si微结构经受应力波加载的实验研究。目前正在开发模拟程序，以预测此类故障，并通过适当的设计来防止此类故障。