SBIR Phase I: Low Temperature Formation of Polycrystalline Ferroelectric BaTiO3 Thin Films

该小型企业创新研究（SBIR）第一阶段项目将开发一种在氢氧化钡（BaOH 2）电解质中通过多晶钛的阳极氧化生长铁电多晶钛酸钡（BaTiO 3）薄膜的工艺。通过利用这种新颖的、低成本的铁电形成方法，将有可能在相对低的温度（低于100 ℃）下获得薄的、均匀的铁电膜，其表现出约200的介电常数。虽然这种性质的薄膜在各种其他电气设备中找到了应用，但如果成功，该公司将利用这种新技术用于集成薄膜去耦电容器，因为它比传统的分立去耦电容器具有显著的优势。另一个潜在的应用是光波导。铁电薄膜在薄膜无源器件和光波导中有着广泛的应用。

This Small Business Innovation Research (SBIR) Phase I project will develop a process for growing ferroelectric, polycrystalline barium titinate (BaTiO3) thin-films, by anodic oxidation of polycrystalline titanium, in a barium hydroxide (BaOH2) electrolyte. By utilizing this novel, low-cost method of ferroelectric formation, it will be possible to obtain thin, uniform ferroelectric films at relatively low temperatures (less than 100C) that exhibit dielectric constants around 200. Though films of this nature find applications in various other electrical devices, the company will utilize this novel technology, if successful, for integral thin-film decoupling capacitors due to the significant advantages offered over traditional discrete decoupling capacitors. Another potential application is optical waveguides. Ferroelectric thin films have applications in thin-film passive components as well as optical waveguides.