SBIR Phase I: ELEX - Innovative Low-Cost Manufacturing Technology for High Aspect Ratio Microelectromechanical Systems (MEMS)

SBIR 第一阶段：ELEX - 高深宽比微机电系统 (MEMS) 的创新低成本制造技术

• 批准号: 0060725
• 负责人: Adam Cohen
• 金额: $ 9.96万
• 依托单位: Microfabrica, Inc.
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2001
• 资助国家: 美国
• 起止时间: 2001-01-01 至 2001-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0060725&HistoricalAwards=false
• 关键词: SBIR; Phase; ELEX; Innovative; Low

This Small Business Innovation Research (SBIR) Phase I project will investigate the feasibility of developing an innovative manufacturing process for prototyping and batch manufacturing high-aspect ratio microelectromechanical systems (MEMS) and related microparts and microstructures. The goal is to replace an electrodeposition-based micromachining technique, requiring the use of a $10-20 million synchrotron (the so-called LIGA process) with an innovative extrusion-like process performed in an automated desktop machine selling for $250,000 or less. By supplying the MEMS industry with capital equipment for the manufacture of LIGA-type microstructures at a cost two orders of magnitude lower, this project could greatly accelerate the commercialization of MEMS and other microscale devices, and make the U.S. more competitive in this rapidly-growing global industry. If successful, the resulting technology could also significantly reduce time-to market for new products, fabricate much taller structures than are possible with LIGA, and provide better control over the uniformity of material properties.Commerical applications cover many highly-miniaturized sensors and actuators in a variety of industries, allowing reduced cost, weight, size, and power consumption.

这个小型企业创新研究(SBIR)第一阶段项目将研究开发一种创新制造工艺的可行性，以用于高深宽比微电子机械系统(MEMS)及其相关微零部件和微结构的原型制作和批量制造。其目标是取代基于电沉积的微加工技术，需要使用价值1000-2000万美元的同步加速器(所谓的LIGA工艺)，用一种创新的类似挤出的工艺在售价25万美元或更低的自动化台式机器上执行。通过以低两个数量级的成本为MEMS行业提供制造LIGA类型微结构的资本设备，该项目可以极大地加速MEMS和其他微尺度器件的商业化，并使美国在这个快速增长的全球行业中更具竞争力。如果成功，所产生的技术还可以显著缩短新产品的上市时间，制造比LIGA更高的结构，并对材料性能的一致性提供更好的控制。商业应用涵盖各种行业中的许多高度微型化的传感器和执行器，从而降低成本、重量、尺寸和功耗。