SGER: Foundations of Three-Dimensional Micro-Optical Systems

该项目的主要目标是对微光和微电子元件零对准集成的通用方法进行定量研究。这种方法是基于体微加工基板的概念，它起着光学表的作用。PI提出了一种微光学工作台（MOT），在该工作台上可以精确定位各种光学元件、光源，例如表面发射激光器和光电探测器，而无需进行广泛的校准。在这个项目的过程中，我们将：(1)设计和制造光学元件的原型MOT安装槽，(2)进行MOT微组装实验，(3)开发和应用计量技术来表征组装的微光学系统。这里提出的研究将允许对MOT概念在生物医学传感、生物医学成像、光学数据存储和化学传感中的应用的适用性进行定量判断

0074578DescourThe main objective of this project is a quantitative investigation of aversatile methodology for zero-alignment integration of micro-optical andmicro-electronic components. This methodology is based on the concept of abulk-micromachined substrate that plays the role of an optical table. The PI'spropose a micro-optical table (MOT) on which a variety of optical elements,light sources, e.g., surface-emitting lasers, and photo-detectors can beaccurately positioned without the need for extensive alignment. In thecourse of this project we will: (1) design and fabricate prototype MOTmounting slots for optical elements, (2) perform MOT micro-assemblyexperiments, and (3) develop and apply metrology techniques to characterizethe assembled micro-optical systems. The research proposed here will permita quantitative judgment regarding the suitability of the MOT concept forapplications in biomedical sensing, biomedical imaging, optical datastorage, and chemical sensing."***