Reactions of First Row Transition Metal 2,4 Pentanedionato Complexes in CVD Processes

詹姆斯麦迪逊大学的托马斯德沃尔教授受实验物理化学计划的资助，对化学气相沉积（CVD）工业过程中发生的化学反应进行实验研究。 由于高压条件（1 mbar至环境压力），这些反应在过去很难研究。PI将研究几种第一行过渡金属2，4-戊二酮配合物在CVD条件下的化学反应。 将研究这些复合物在加热的玻璃基板上的热分解动力学以及它们与水或热分解产生的分子的反应。将使用逸出气体分析-傅里叶变换红外光谱法。 还将使用差示扫描量热法研究热分解的机理。 PI随后建议对过渡金属醋酸盐进行平行研究。 这一提议的一个成功成果将是一个预测CVD过程中可能发生的化学反应的模型。 化学气相沉积是一种工业过程，用于用材料薄膜涂覆物体并产生超纯化合物。 这些过程的优化需要对反应中涉及的化学速率常数有一定的了解。 这项研究将收集动力学数据，并试图解释的过程中的机制和能量的数据。 詹姆斯麦迪逊大学是一所本科院校，有几名本科生积极参与这项工作。

Professor Thomas DeVore of James Madison University is funded by the Experimental Physical Chemistry program to perform experimental studies on chemical reactions occuring during the industrial process of chemical vapor deposition (CVD). These reactions have been difficult to study in the past due to the high pressure conditions (1 mbar to ambient pressure). The PI will study the chemical reactions of several first row transition metal 2,4-pentanedionato complexes under CVD conditions. Both the kinetics of the thermal decomposition of these complexes on heated glass substrates and their reactions with water or molecules produced by the thermal decomposition will be studied. Evolved Gas Analysis - Fourier Transform Infrared Spectroscopy will be used. The mechanism of thermal decomposition will also be studied using differential scanning calorimetry. The PI then proposes to perform parallel studies on transition metal acetates. A successful outcome of this proposal would be a model to predict the chemical reactions that could occur during CVD processes. Chemical vapor deposition is an industrial process used to coat objects with thin films of material and to produce ultra-pure chemical compounds. Optimization of these processes require some understanding of the chemical rate constants involved in the reactions. This study will gather kinetic data and will attempt to explain the data in terms of mechanisms and energetics of the processes. James Madison University is an undergraduate institution, and several undergraduate students are actively involved in this work.