SGER-Sensors on Flexible Substrates for Smart Skin

用于智能皮肤的柔性基板上的 SGER 传感器

• 批准号: 0090667
• 负责人: Donald Butler
• 金额: $ 7万
• 依托单位: Southern Methodist University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2000
• 资助国家: 美国
• 起止时间: 2000-10-01 至 2002-03-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0090667&HistoricalAwards=false
• 关键词: SGER; Sensors; Flexible; Substrates; Smart

Abstract0090667Donald P. Butler and Zeynep Celik-ButlerSouthern Methodist UniversitySmall Grants for Exploratory Research (SGER): $70,000 - 12 mos.Sensors on Flexible Substrates for Smart SkinThis is a one-year Small Grant for Exploratory Research (SGER). This project concerns the development of suspended, micromachined sensors on flexible substrates. The project's results will form a basis for the production of other micromachined sensors such as pressure/strain sensors, "hair-like" touch and flow sensors, and accelerometers on flexible substrates. Flexible substrates can serve as the basis of a sensitive skin for humans and robots where sensors are distributed over the skin to provide the sense of touch or monitor the physiology of the wearer. A major obstacle in the development of vanadium oxide bolometers or lead titanate and similar oxide pyroelectric detectors on flexible substrates is the incompatibility between the thermal budget required by the detector material and the low maximum temperature of the flexible substrate. This work will solve the incompatibility between the two thermal budgets by the use of the PI's patented microbolometer material: semiconducting Yttrium Barium Copper Oxide (YBaCuO). The deposition temperature for this infrared sensitive material does not exceed 150 C. High quality nanocrystalline, semiconducting YBaCuO films can be deposited using rf sputtering at ambient temperature. Since there is no requirement for crystallization, high-temperature annealing steps are not necessary. The funding for the project is provided by two NSF divisions, as follows: IIS/CISE - $50,000 ECS/ENG - $20,000

摘要0090667 Donald P. Butler和Zeynep Celik-Butler南方卫理公会大学探索性研究小额赠款（SGER）： $70，000 - 12个月。智能皮肤柔性基板上的传感器这是一个为期一年的探索性研究（SGER）小额赠款。这个项目涉及的发展悬浮，微机械传感器的柔性基板。该项目的成果将为其他微机械传感器的生产奠定基础，如压力/应变传感器，“头发状”触摸和流量传感器，以及柔性基板上的加速度计。柔性基底可以用作人类和机器人的敏感皮肤的基础，其中传感器分布在皮肤上以提供触觉或监测穿戴者的生理。在柔性衬底上的氧化钒测辐射热计或钛酸铅和类似氧化物热电检测器的开发中的主要障碍是检测器材料所需的热预算与柔性衬底的低最大温度之间的不相容性。这项工作将通过使用PI的专利微测辐射热计材料解决两种热预算之间的不兼容性：半导体钇钡氧化铜（YBaCuO）。这种红外敏感材料的沉积温度不超过150 ℃。高质量的纳米晶，半导体YBaCuO薄膜可以在室温下使用射频溅射沉积。由于不需要结晶，因此不需要高温退火步骤。该项目的资金由NSF的两个部门提供，如下： IIS/CISE - 五万块 ECS/ENG -20 000美元