Transport Processes in Chemical Vapor Deposition of Functionally Graded Materials: Fundamental Understanding through Combined Experiments and High-Fidelity Mathematical Modeling

功能梯度材料化学气相沉积中的输运过程：通过组合实验和高保真数学建模获得基本了解

• 批准号: 0099748
• 负责人: Surya Vanka
• 金额: $ 8.45万
• 依托单位: University of Illinois at Urbana-Champaign
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2001
• 资助国家: 美国
• 起止时间: 2001-05-01 至 2002-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0099748&HistoricalAwards=false
• 关键词: Transport; Processes; Chemical; Vapor; Deposition

The objective of this research is to gain a fundamental understanding of the physical and chemical transport processes in the chemical vapor deposition (CVD) of functionally graded methods, through a combined experimental and computational investigation. A functionally graded material (FGM) may be defined as one in which the composition of the material varies gradually from one extreme to another. Functionally graded materials can successfully be used to join two disjoint materials such as metals and ceramics, or provide coatings on substrates in such a way as to provide a gradual variation of the thermal expansion coefficient. CVD involves the gradual deposition of a material on a substrate heated to a temperature where chemical reactions can take place, thus forming a thin layer of deposit. A typical CVD process involves complex interactions between flow, temperature, species concentrations, and reactor geometry. Understanding the precise interactions between the various flow variables is very essential to obtaining the optimum set of operating parameters, and their manner of variation.The fundamental issues addressed in the experiments will be the transient planar distributions of the chemical species transported by the carrier gas, and of temperature near the surface of the substrate. The objective of the computational study will be to develop a mathematical model of the transient flow, heat transfer and chemical reactions that occur during the graded deposition process.

本研究的目的是通过实验和计算相结合的研究，获得一个基本的理解的物理和化学的传输过程中的化学气相沉积（CVD）的功能梯度方法。 功能梯度材料（FGM）可以被定义为其中材料的组成从一个极端到另一个极端逐渐变化的材料。 功能梯度材料可以成功地用于连接两种不相交的材料，例如金属和陶瓷，或者以提供热膨胀系数逐渐变化的方式在基底上提供涂层。CVD涉及材料在加热到可以发生化学反应的温度的衬底上的逐渐沉积，从而形成存款的薄层。 典型的CVD工艺涉及流量、温度、物质浓度和反应器几何形状之间的复杂相互作用。了解各种流动变量之间的精确相互作用是非常必要的，以获得最佳的一组操作参数，和他们的方式的variation.The实验中解决的基本问题将是瞬态平面分布的载气运输的化学物种，和温度附近的衬底表面。 计算研究的目的是建立一个数学模型，描述梯度沉积过程中发生的瞬态流动、传热和化学反应。