Interface and Evolution Methods For Semiconductor Processing

半导体处理的接口和演化方法

• 批准号: 0104445
• 负责人: James Sethian
• 金额: $ 8万
• 依托单位: University of California-Berkeley
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2001
• 资助国家: 美国
• 起止时间: 2001-07-01 至 2003-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0104445&HistoricalAwards=false
• 关键词: Interface; Evolution; Methods; Semiconductor; Processing

The research work will concern mathematical and numerical aspects of semiconductor manufacturing, specifically to work on problems of microstructural reliability, including aspects of electromigration and chemical mechanical polishing. The work will be combination of mathematical modeling to produce reasonable physical models, complete with appropriate boundary conditions and internal dynamics, and numerical algorithms, in part relying on algorithms for surface evolution and elliptic solvers in irregular domains. The goal will be numerical simulations and comparisons with experiment.Dr. L. Borucki from Motorola Corporation will take this Senior Research Fellowship in the Department of Mathematics at the University of California- Berkeley. This GOALI project is jointly supported by the MPS Office of Multidisciplinary Activities (OMA) and the Division of Mathematical Sciences (DMS).

研究工作将涉及半导体制造的数学和数值方面，特别是微结构可靠性问题，包括电迁移和化学机械抛光方面的工作。这项工作将结合数学建模，以产生合理的物理模型，完成适当的边界条件和内部动力学，以及数值算法，部分依赖于表面演化算法和不规则域中的椭圆求解器。 目标是数值模拟和与实验的比较。来自摩托罗拉公司的Borucki将获得加州-伯克利大学数学系的高级研究奖学金。 该GOALI项目由MPS多学科活动办公室（OMA）和数学科学部（DMS）联合支持。