SBIR Phase I: Two-Dimensional X-Ray Diffraction Detector Using New Fluidic Self-Assembly Manufacturing Techniques

SBIR 第一阶段：采用新型流体自组装制造技术的二维 X 射线衍射探测器

• 批准号: 0109652
• 负责人: Carolyn Tull
• 金额: $ 10万
• 依托单位: Photon Imaging, Inc.
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2001
• 资助国家: 美国
• 起止时间: 2001-07-01 至 2002-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0109652&HistoricalAwards=false
• 关键词: SBIR; Phase; Two; Dimensional; Ray

This Small Business Innovation Research (SBIR) Phase I project will apply fluidic self-assembly (FSA) technology to the fabrication of large area silicon-based X-ray imaging arrays. FSA technology offers potential for cost-effective production of high-speed, high-performance X-ray imaging arrays that are now in demand for synchrotron protein crystallography, X-ray astronomy, and mammography. Silicon X-ray diode arrays and complementary metal oxide semiconductor (CMOS) circuit chips will be micro-machined into the appropriate shapes for subsequent assembly using FSA. The FSA apparatus for transporting the micro-machined chips to the receptor substrate will be assembled and evaluated. Phase I will evaluate these techniques in fabrication of an X-ray imaging array. Phase II would include the design and fabrication of optimized detector structures and custom CMOS readout circuits, and optimization of the assembly procedures for a prototype-imaging array for synchrotron protein crystallography.Potential applications are expected in the commercial production of X-ray imaging devices for medical, scientific, and other purposes.

这个小企业创新研究（SBIR）第一阶段项目将应用流体自组装（FSA）技术制造大面积硅基X射线成像阵列。 FSA技术为经济高效地生产高速、高性能的X射线成像阵列提供了潜力，这些阵列现在正被同步加速器蛋白质晶体学、X射线天文学和乳腺X射线摄影术所需要。 硅X射线二极管阵列和互补金属氧化物半导体（CMOS）电路芯片将被微加工成适当的形状，以便随后使用FSA进行组装。 将组装和评估用于将微加工芯片输送到受体基板的FSA装置。 第一阶段将评估这些技术在制造的X射线成像阵列。 第二阶段将包括优化的探测器结构和定制CMOS读出电路的设计和制造，以及同步加速器蛋白质晶体学原型成像阵列的组装程序的优化，预计在医疗，科学和其他目的的X射线成像设备的商业生产中有潜在的应用。