GOALI: Mechanisms and Optimization of Laser Assisted Particle Removal

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Proposal Number: CTS-0218024Institution: Florida State UniversityPI Name: S. Allen, L. Gelb, and M. HussainiNSF Program name: Particulate and Multiphase ProcessesTitle: Mechanisms and Optimization of Laser Assisted Particle RemovalABSTRACTRemoval of ultrafine particles, particularly in the nanoscale, pose a challenge to the semiconductor industry and other industries manufacturing material with clean surfaces. The laser assisted particle removal (LAPR) is a promising method for efficient removal of fine particles when other methods fail. Depending on where the laser energy is transferred and how the particle is separated from the surface, the LAPR is categorized by the PIs into four mechanisms. The objective of the proposed GOALI project is to investigate the physiochemical mechanisms of LAPR by experiments and computational analyses. A model will be developed to clearly explain the underlying physics of energy transfer and particle removal depending on the laser wavelength, particle size and the characteristics of medium surrounding the particle.