Integrated Sensing: Collaborative Research: Development of Multifunctional Wireless Sensory Microsystems with Integrated Nanoelectromechanical Devices

纳米级科学技术的发展为分布式无线传感器网络在环境监测、民用基础设施监测、状态维护、安全和监视等应用中开发超小型低功耗传感器节点提供了新的途径。纳米机电系统(NEMS)的尺寸和质量的降低对高灵敏的力和质量传感具有极大的兴趣。我们提出了一种基于组装纳米结构纳米机械传感器的新技术，而不是直接从衬底材料进行加工。纳米机械传感结构将采用自下而上的合成方法制造，然后表面组装，并通过电流体组装与铸造制造的单片电路集成，允许纳米机械传感器与传感、读出、处理和通信电路在芯片上集成。这种方法还提供了灵活性和可伸缩性，能够组装更大范围的功能结构。利用我们在NEMS器件开发和模拟/射频/微波IC设计方面的核心能力，我们将开发一个基于微功率纳米传感器的微系统，包括纳米传感器组装/集成地点、传感器特定的转换和读出电子设备。这些研究活动与相关的教育/推广目标相辅相成。其中包括夏季微电子研讨会的基础工作，该研讨会将为当地高中教师提供洁净室研究体验。这一试点计划有望对K-12科学和数学教育产生重大影响。这些教学和研究活动的结合将使一个完整的学术计划成为“自下而上”的纳米技术和微系统之间的桥梁。更具体地说，所提出的将纳米传感器的电流控组装与预制功能电路相结合的提议，代表了开发能够“感知、思考或交流”的一体化纳米系统的现实可能性。

Recent advances in nanometer scale science and technology offer novel approaches for the development of ultra-miniature low-power sensor nodes for distributed wireless sensor networks in applications such as environmental monitoring, civil infrastructure monitoring, condition-based maintenance, security and surveillance. The reduced dimensions and masses of nanoelectromechanical systems (NEMS) are of great interest for highly-sensitive force- and mass-sensing. We propose a novel technology based on assembly of nanostructured nanomechanical sensors rather than their direct machining from the substrate material. Nanomechanical sensing structures will be produced using "bottom-up" synthesis, then surface assembled and integrated with foundry-fabricated monolithic circuits through electrofluidic assembly, allowing on-chip integration of nanomechanical sensors with transduction, readout, processing, and communications circuitry. This approach also offers flexibility and scalability, enabling the assembly of a larger range of functional structures. Leveraging our core competencies in NEMS device development and analog/RF/microwave IC design, we will develop a micropower nanosensor-based microsystem containing nanosensor assembly/integration sites, sensor-specific transduction, and read-out electronics.These research activities are complemented with related education/outreach goals. These include the groundwork for Summer Microelectronics Workshops that will provide cleanroom research experiences to local high-school teachers. This pilot program offers the promise for substantial impact in K-12 science and mathematics education. The combination of these pedagogical and research activities will enable a complete academic program that bridges the gap between "bottom-up" nanotechnology and microsystems. More specifically, the proposed integration of electrofluidic assembly of nanosensors with prefabricated functional circuits represents realistic possibilities for the development of Integrative Nanosystems that can "sense, think, or communicate".