PECASE: Development of Advanced MEMS Actuator Technology for Microrobotics

提案标题：PECASE：开发先进的MEMS微机器人致动器技术机构：马里兰州大学园区智力Meritle这PECASE建议解决了一个新的致动器技术的发展的基础上，电介质弹性体的微机器人，飞行微器件和微操作。这将需要开发新的制造工艺。工艺的进步将使我们能够设计和制造三种基本的微驱动元件：1。面外致动器，这也将允许测量致动器指标，为设备建模提供必要的数据。2.弯曲致动器，将用于实现具有6个自由度运动的新型铰接结构。3.更广泛的影响研究：使用介电弹性体致动器的动机是，它们是坚韧和顺应性，并具有非常高的效率，而现有的微致动器要么太脆，无法传输接触负载，要么消耗太多的功率来携带自己的电源。介电弹性体致动器也固有地用作传感器。因此，拟议的研究将使实现强大的，自主的执行器，MEMS设备可以用于行走，操纵，也许飞行，这将影响不同的领域。教育：我将采用基于探究的教学方法，以提高学习效果。学生将制定自己的项目，并使用在课程中获得的知识来实现他们的目标。这些项目将使学生接触到实际的研究经验。这种方法将首先在两部分的本科MEMS课程中实施，在该课程中，学生设计和制造类似蚂蚁的行走微型器件的原始构建块。这些组件将是执行器，包括腿，操纵臂和化学喷射自卫系统。本课程将利用介电弹性体的研究成果，并以学生的装置来推动研究，使研究与教学紧密结合。一个更广泛的课程开发工作将建立一个全面的MEMS核心计划在UMD。这个项目最初是作为一个职业奖资助，并在2004年9月转换为总统早期职业奖工程师和科学家（PECASE）奖。

Proposal Title: PECASE: Development of Advanced MEMS Actuator Technology for MicroroboticsInstitution: University of Maryland College ParkIntellectual MeritThis PECASE proposal addresses the development of a new actuator technology based on dielectric elastomers for microrobotics, flying microdevices, and micromanipulation. This will require the development of new fabrication processes. I shall: The processing advances will permit us to design and fabricate three types of elementary micro- actuation components: 1. Out-of-plane actuators, which will also allow the measurement of actuator metrics that provide data essential for device modeling. 2. Bending actuators, which will be used to realize novel articulated structures with 6 degree-of-freedom movement. 3. In-plane actuators that can be effectively coupled with Si MEMS devices.Broader ImpactResearch: The motivation for using dielectric elastomers actuators is that they are tough and compliant and have an extraordinarily high efficiency, whereas existing microactuators are either too brittle to transmit contact loads or consume too much power to carry their own power supplies. Dielectric elastomer actuators also inherently function as sensors. The proposed research will therefore make possible the realization of robust, autonomous actuators that MEMS devices can use for walking, manipulating, and perhaps flying, which will impact diverse fields.Education: I will adopt inquiry-based teaching methods in order to improve learning outcomes. Students will formulate their own projects and use knowledge gained during the course to accomplish their objectives. These projects will expose students to actual research experiences. This approach will first be implemented in a 2-part undergraduate MEMS course in which students design and fabricate original building blocks of an ant-like, walking microdevice. These components will be the actuators, including legs, manipulating arms, and chemical-squirting self-defense system. The dielectric elastomer research will be utilized in the course, and the student's devices will advance the research, closely integrating the research and education. A broader curriculum development effort will establish a comprehensive MEMS core program at UMD.This project was originally funded as a CAREER award, and was converted to a Presidential Early Career Award for Engineers and Scientists (PECASE) award in September 2004.