Synthesis and Characterization of Nanoscale Metal Oxide Heterostructures for Chemical Sensing

用于化学传感的纳米级金属氧化物异质结构的合成和表征

• 批准号: 0308012
• 负责人: Xiaoqing Pan
• 金额: $ 39.46万
• 依托单位: Regents of the University of Michigan - Ann Arbor
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2003
• 资助国家: 美国
• 起止时间: 2003-07-01 至 2007-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0308012&HistoricalAwards=false
• 关键词: Synthesis; Characterization; Nanoscale; Metal; Oxide

Objectives of this project are: (1) to expand basic knowledge of growth and property characterization of high-quality oxide semiconductor thin films and p-n heterostructures; (2) to systematically characterize electrical transport properties of the films and p-n heterostructures as a function of chemical doping, film thickness, bias applied, and temperature; (3) to fabricate model systems based on epitaxial single crystal films consisting of field effect transistor (FET) structures and develop a fundamental understanding of the effect of bias applied across the p-n junction on electrical transport properties and selective adsorption properties; and (4) to explore fabrication and characterization of more complex devices such as bipolar transistors with an exposed p-n junction. These devices offer the possibility of amplified electronic response to adsorption at exposed p-n junctions, which may provide a new level of control at the atomic and molecular level.The long-term goal is to develop a fundamental understanding of oxide-based semiconductor heterostructures suitable for the design of nanoengineered sorbents, tunable displays, catalytic materials, and chemical sensors. The understanding gained is expected to provide guidance for improvement of chemical selectivity and sensitivity, and provide a science base for the development of microelectronic devices for selective, tunable chemical sensing. The insights gained will be beneficial not only for advancing chemical sensor technology and for improving health and safety in society, but also impact the basic research and technology development of transparent electrodes for electronic and optical devices. Additionally, through collaboration with Ford, fundamental information that this project will provide may improve emissions control technology for lean-combustion engines. Thus, the intellectual and broader impact of the proposed research may reach well beyond the realm of chemical sensing.%%% This project addresses basic materials research issues in a topical area of materials science with technological relevance, and places emphasis on the integration of research and education. The research program provides excellent opportunities for hands-on experience in the use of sophisticated scientific equipment. Graduate and undergraduate students will be involved in the synthesis, processing, and characterization of electronic materials. The project integrates research with educational outreach which includes (1) creating a mechanism to expose materials research to high school minority students through the existing NASA SHARP Plus program at the University of Michigan, (2) involving undergraduates (particularly women and minority students) in research early in their careers, and (3) bringing the nano-world to the classroom through remote control of electron microscopes via the internet. It is planned to use this facility to demonstrate to a high school class, both live and via a virtual microscopy base, how materials can be manipulated at the atomic scale, and also to use this system for demonstrations to attract undergraduates to materials science and engineering. Students involved in this project will have the opportunity to learn film growth techniques, device fabrication, materials characterization, and to interact with high school students. This interdisciplinary education will provide students with special opportunities and a broad perspective valued in both industrial and academic research.***

本项目的目标是：(1)扩展高质量氧化物半导体薄膜和p-n异质结的生长和性质表征的基本知识；(2)系统地表征薄膜和p-n异质结的电输运性质，作为化学掺杂、薄膜厚度、施加的偏压和温度的函数；(3)制作基于由场效应晶体管(FET)结构组成的外延单晶薄膜的模型系统，并对p-n结上施加的偏压对电输运性质和选择性吸附性质的影响有一个基本的了解；以及(4)探索更复杂的器件的制造和表征，例如具有暴露的p-n结的双极型晶体管。这些器件提供了在暴露的p-n结上放大电子对吸附的响应的可能性，这可能在原子和分子水平上提供新的控制水平。长期目标是发展对氧化物半导体异质结构的基本理解，适合于设计纳米工程吸附剂、可调显示器、催化材料和化学传感器。所取得的认识有望为提高化学选择性和灵敏度提供指导，并为开发用于选择性、可调谐化学传感的微电子器件提供科学基础。这些研究成果不仅有利于化学传感器技术的进步和社会健康安全的提高，而且将对电子和光学器件透明电极的基础研究和技术发展产生重要影响。此外，通过与福特的合作，该项目将提供的基本信息可能会改善稀燃发动机的排放控制技术。因此，拟议研究的智力和更广泛的影响可能远远超出化学传感的领域。%这个项目解决与技术相关的材料科学专题领域的基础材料研究问题，并强调研究和教育的整合。该研究计划提供了在使用尖端科学设备方面的实践经验的绝佳机会。研究生和本科生将参与电子材料的合成、加工和表征。该项目将研究与教育推广相结合，包括(1)创建一种机制，通过密歇根大学现有的NASA Sharp Plus计划向高中生展示材料研究；(2)让本科生(特别是女性和少数族裔学生)在他们职业生涯的早期从事研究；以及(3)通过互联网远程控制电子显微镜，将纳米世界带到课堂上。计划使用这个设施向一个高中班级现场和通过虚拟显微镜基地演示如何在原子尺度上操纵材料，并利用这个系统进行演示，以吸引本科生学习材料科学和工程。参与这个项目的学生将有机会学习薄膜生长技术、器件制造、材料表征，并与高中生互动。这种跨学科的教育将为学生提供特殊的机会和广阔的视角，在工业和学术研究中都有价值。