SBIR Phase I: In Line Thin Film Battery (Cathode) Plasma Enhanced-Metal Organic Chemical Vapor Deposition (PE-MOCVD) Production Tool

SBIR 第一阶段：在线薄膜电池（阴极）等离子体增强金属有机化学气相沉积 (PE-MOCVD) 生产工具

• 批准号: 0319623
• 负责人: Catherine Rice
• 金额: $ 10万
• 依托单位: STRUCTURED MATERIALS INDUSTRIES, INC.
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2003
• 资助国家: 美国
• 起止时间: 2003-07-01 至 2004-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0319623&HistoricalAwards=false
• 关键词: SBIR; Phase; Line; Thin; Film

This Small Business Innovation Research Phase I project will demonstrate proof of concepts of a next generation plasma-enhanced low temperature in-line linear PE-MOCVD (Web coating) system for thin film batteries. The requisite thin film battery technology exists and prototyping of the same on a polymer substrate has begun. Presently, the major limitation is the ability to effectively manufacture the solid-state cathode. Present efforts have shown a low temperature PE-CVD approach to be the best; however, no such tool meeting all the needs exists today. In defined steps, a prototype of the needed tool will be made, which will be sold commercially.Thin-film rechargeable batteries have numerous possible applications as active or standbypower sources for microelectronics. Examples of active power sources include MEMS devices, smart cards, remote sensors, miniature transmitters, and implantable medical devices. Standby power applications include PCMCIA cards and other types of CMOS-SRAM memory devices.

这个小型企业创新研究第一阶段项目将展示用于薄膜电池的下一代等离子体增强型低温在线线性PE-MOCVD（Web涂层）系统的概念证明。必要的薄膜电池技术已经存在，并且已经开始在聚合物基板上进行原型制作。目前，主要的限制是有效地制造固态阴极的能力。目前的努力表明，低温PE-CVD方法是最好的;然而，目前还没有这样的工具满足所有的需求。在确定的步骤中，将制作所需工具的原型，并将进行商业销售。薄膜可充电电池作为微电子的有源或备用电源有许多可能的应用。有源电源的示例包括MEMS器件、智能卡、远程传感器、微型发射器和可植入医疗设备。待机电源应用包括PCMCIA卡和其他类型的CMOS-SRAM存储器设备。