SBIR Phase I: In Line Thin Film Battery (Cathode) Plasma Enhanced-Metal Organic Chemical Vapor Deposition (PE-MOCVD) Production Tool

这个小企业创新研究第一阶段项目将展示用于薄膜电池的下一代等离子体增强低温在线线性PE-MOCVD（网膜涂层）系统的概念。必要的薄膜电池技术已经存在，并且已经开始在聚合物衬底上进行原型制作。目前，主要的限制是能够有效地制造固态阴极。目前的研究表明，低温PE-CVD方法是最好的；然而，目前还没有满足所有需求的工具。在确定的步骤中，所需工具的原型将被制造出来，并将进行商业销售。薄膜可充电电池作为微电子的有源或备用电源有许多可能的应用。有源电源的例子包括MEMS设备、智能卡、远程传感器、微型发射器和植入式医疗设备。待机电源应用包括PCMCIA卡和其他类型的CMOS-SRAM存储设备。

This Small Business Innovation Research Phase I project will demonstrate proof of concepts of a next generation plasma-enhanced low temperature in-line linear PE-MOCVD (Web coating) system for thin film batteries. The requisite thin film battery technology exists and prototyping of the same on a polymer substrate has begun. Presently, the major limitation is the ability to effectively manufacture the solid-state cathode. Present efforts have shown a low temperature PE-CVD approach to be the best; however, no such tool meeting all the needs exists today. In defined steps, a prototype of the needed tool will be made, which will be sold commercially.Thin-film rechargeable batteries have numerous possible applications as active or standbypower sources for microelectronics. Examples of active power sources include MEMS devices, smart cards, remote sensors, miniature transmitters, and implantable medical devices. Standby power applications include PCMCIA cards and other types of CMOS-SRAM memory devices.