SBIR Phase I: Minature Radio Frequency/Micro-Electro-Mechanical Systems Absolute Pressure Transducer

SBIR 第一阶段：微型射频/微机电系统绝对压力传感器

• 批准号: 0319845
• 负责人: Kevin Knopp
• 金额: $ 9.98万
• 依托单位: Ahura Corporation, Inc.
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2003
• 资助国家: 美国
• 起止时间: 2003-07-01 至 2003-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0319845&HistoricalAwards=false
• 关键词: SBIR; Phase; Minature; Radio; Frequency

This Small Business Innovation Research (SBIR) Phase I project proposes the development of an entirely new MEMS (Micro Electro-Mechanical Systems) pressure sensor architecture that is capable of providing a combination of sensitivity and dynamic range much beyond the state-of-the-art. The sensor structure is made small and light enough to be able to move under the influence of the pressure bombardment in a manner that can be recorded by phase sensitive electronics. The differential pressure is eliminated so that there is no net average force on the transducer membrane and hence no DC term in the output. A purely electrical measurement technique that exploits the change in the structure's capacitance as the membrane moves will be used. The proposed detection approach is a phase measurement technique; promising very high sensitivity and noise immunity. The worldwide market for compact pressure sensors is in excess of $2.5B and extends from low-cost consumer products to high-end scientific and military systems. For all applications, low-cost, small-size, and especially low power dissipation are essential.

这个小企业创新研究（SBIR）第一阶段项目提出了一个全新的MEMS的发展（微机电系统）压力传感器架构，能够提供远超现有技术的灵敏度和动态范围的组合。传感器结构被制造得足够小和轻，以能够在压力轰击的影响下以可以通过以下方式记录的方式移动：相敏电子学压差被消除，使得换能器膜上没有净平均力，因此输出中没有DC项。将使用一种纯电测量技术，该技术利用膜移动时结构电容的变化。所提出的检测方法是一种相位测量技术，具有非常高的灵敏度和抗噪性。紧凑型压力传感器的全球市场超过25亿美元，从低成本消费产品延伸到高端科学和军事系统。对于所有应用，低成本、小尺寸、特别是低功耗是必不可少的。