SBIR Phase I: Mesoscale Optical Element Fabrication Development by Laser Microchemical Etching

这个小型企业创新研究第一阶段项目将使用商业激光系统进行激光化学蚀刻，以开发制造微光电机械系统（MOEMS）组件的工艺，如微透镜、通道和电触点，方法是用激光直接写入。MEMS/MOEMS器件通常很难制造，其架构通常受限于需要使用从集成电路行业借来的传统光刻工具。在制造MOEMS设备中出现的主要问题很简单，就是创造高精度的受控非平面，或者在非平面表面上制造一些东西，并提供高质量的表面光洁度。在本提案中，将开发一种结合光学、微流体和电气元件的MOEMS测试结构，用于通过直接激光蚀刻和写入创建近距离通用结构的可行性。微光电机械系统（MOEMS）正在光电子、医疗设备、传感器、通信、航空航天和汽车工业中取得进展。这个市场正在不断扩大，到2005年将成为一个数十亿美元的市场。

This Small Business Innovation Research Phase 1 Project will use a commercial laser system for laser chemical etching to develop processes to fabricate Micro-opto-electro-mechanical systems (MOEMS) components such as micro-lenses, channels, and electrical contacts by directly writing with a laser. MEMS/MOEMS devices are often difficult to make and the architectures are often limited by the need to use conventional lithographic tools borrowed from the integrated circuit industry. The main issue that arises in the fabrication of MOEMS devices is simply that of creating controlled non-flat surfaces with high precision, or fabricating something on a non-flat surface, and high quality surface finish. In this proposal the feasibility of creating the general structures in close proximity, for creating by direct laser etching and writing, a MOEMS test structure incorporating optical, microfluidic, and electrical elements will be developed. Micro-opto-electro-mechanical systems (MOEMS) are making inroads in the Optoelectronics, medical equipment, sensors, communications, aerospace and automotive industries. This market is ever expanding and will be a multi-billion dollar market by 2005.