SBIR Phase I: Mesoscale Optical Element Fabrication Development by Laser Microchemical Etching

SBIR 第一阶段：通过激光微化学蚀刻开发介观光学元件制造

• 批准号: 0319918
• 负责人: Michael Burns
• 金额: $ 10万
• 依托单位: LMC Instrument Corp. A.B.A. Revise, Inc.
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2003
• 资助国家: 美国
• 起止时间: 2003-07-01 至 2003-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0319918&HistoricalAwards=false
• 关键词: SBIR; Phase; Mesoscale; Optical; Element

This Small Business Innovation Research Phase 1 Project will use a commercial laser system for laser chemical etching to develop processes to fabricate Micro-opto-electro-mechanical systems (MOEMS) components such as micro-lenses, channels, and electrical contacts by directly writing with a laser. MEMS/MOEMS devices are often difficult to make and the architectures are often limited by the need to use conventional lithographic tools borrowed from the integrated circuit industry. The main issue that arises in the fabrication of MOEMS devices is simply that of creating controlled non-flat surfaces with high precision, or fabricating something on a non-flat surface, and high quality surface finish. In this proposal the feasibility of creating the general structures in close proximity, for creating by direct laser etching and writing, a MOEMS test structure incorporating optical, microfluidic, and electrical elements will be developed. Micro-opto-electro-mechanical systems (MOEMS) are making inroads in the Optoelectronics, medical equipment, sensors, communications, aerospace and automotive industries. This market is ever expanding and will be a multi-billion dollar market by 2005.

该小型企业创新研究第一阶段项目将使用商用激光系统进行激光化学蚀刻，开发通过激光直接写入来制造微光机电系统（MOEMS）组件（例如微透镜、通道和电触点）的工艺。 MEMS/MOEMS 器件通常难以制造，并且其架构通常因需要使用从集成电路行业借用的传统光刻工具而受到限制。 MOEMS 设备制造中出现的主要问题就是创建高精度的受控非平坦表面，或者在非平坦表面上制造某些东西以及高质量的表面光洁度。 在该提案中，将开发在附近创建通用结构的可行性，通过直接激光蚀刻和写入来创建包含光学、微流体和电气元件的 MOEMS 测试结构。微光机电系统（MOEMS）正在进军光电、医疗设备、传感器、通信、航空航天和汽车行业。 这个市场正在不断扩大，到2005年将成为一个价值数十亿美元的市场。