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Oscillating microoptical fiber sensor for precision production measurement

用于精密生产测量的振荡微光纤传感器

基本信息

批准号：
164089261
负责人：
Professor Dr.-Ing. Peter Lehmann
金额：
--
依托单位：
Fachgebiet Messtechnik
依托单位国家：
德国
项目类别：
Research Grants
财政年份：
2010
资助国家：
德国
起止时间：
2009-12-31 至 2015-12-31
项目状态：
已结题

来源：
https://gepris.dfg.de/gepris/projekt/164089261?language=en
关键词：
Oscillating microoptical fiber sensor precision

项目摘要

During the first phase of the project optical sensors with different oscillating fiber optical microprobes were built, analyzed, and optimized with respect to the used components and signal processing algorithms. A result is a two wavelength interferometer which reaches a standard deviation of repeatability measurements below 1 nanometer. The system measures on plane, tilted, and curved specularly reflecting surfaces. Based on existing components and systems in the second phase of the project more advanced research topics shall be studied in order to be able to assess the capabilities of the novel technology. Crucial aspects are related to an enhancement of the data rate of the sensor, roughness measurement on engineered surfaces, extension of the measurement range until an absolute distance measurement is reached, improvement of the microoptical probes, and finally the measurement of 3D-topography via dynamic probe tracking. An extended analysis of the measured phase-modulated interference signals based on the Hilbert transformation aims at an enhanced data rate of the sensor of several 100 kHz. Preliminary investigations show that the use of infrared light of the wavelength range from 1300 nm to 1550 nm enables surface roughness measurements on engineered surfaces characterized by Ra values of several 100 nanometers. Therefore, the applicability of the new sensor to surface roughness measurement shall be studied in detail. Approaches known from literature allow an extension of the measurement range of a two wavelength interferometer beyond the limitation of half the synthetic wavelength. These approaches shall be used in context with the new sensor considering the uncertainty of phase measurement. In order to demonstrate the capabilities of the sensor a demonstration system comprising two lateral scan axes and a precise contour tracking mechanism shall be built. This requires an electronic synchronization of the actuator signal and the measured signals in order to achieve as good as possible measurement accuracy.

在该项目的第一阶段，构建、分析并优化了具有不同振荡光纤微探针的光学传感器所使用的组件和信号处理算法。结果是双波长干涉仪达到低于1纳米的重复性测量的标准偏差。该系统可在平面、倾斜和弯曲镜面反射表面上进行测量。在项目第二阶段，将在现有组件和系统的基础上研究更先进的研究课题，以便能够评估新技术的能力。关键的方面是有关的传感器的数据速率的增强，工程表面上的粗糙度测量，测量范围的扩展，直到达到绝对距离测量，改进的微光学探头，最后通过动态探头跟踪的三维形貌测量。基于希尔伯特变换的测量相位调制干涉信号的扩展分析旨在提高传感器的几个100 kHz的数据速率。初步研究表明，使用波长范围从1300 nm到1550 nm的红外光能够测量工程表面的表面粗糙度，其特征在于Ra值为几百纳米。因此，这种新型传感器在表面粗糙度测量中的适用性有待进一步研究。从文献中已知的方法允许将双波长干涉仪的测量范围扩展到超过合成波长的一半的限制。这些方法应与考虑相位测量不确定性的新传感器一起使用。为了演示传感器的能力，应建立一个演示系统，包括两个横向扫描轴和一个精确的轮廓跟踪机制。这需要致动器信号和测量信号的电子同步，以便实现尽可能好的测量精度。