SENSORS: Broad-Bandwidth High-Resolution MEMS Array of Inertial Sensors with Embedded Optical Detection

该项目的目标是开发一种强大且维护成本低的传感器网络技术，能够在非常宽的频率带宽（高于1,000 Hz）中检测低于微g的加速度。具有这种性能的传感器网络对于导航、地震学、声学传感以及包括高科技设施微振动在内的民用结构的健康监测至关重要。将开发一种基于批量制造高灵敏度加速度计阵列的新技术，每个加速度计都使用嵌入式光学检测的法布里-珀罗腔。其独特之处在于每个单独的传感器不需要本地电源，而是使用一个全局光源，它通过光纤网络在传感器到传感器之间产生b4路带光信号，从而通过网络携带信息并为网络内的每个单独的传感器提供输入信号。基于到达的数据“彩虹”，实时评估网络端点的全局输出和网络的健康状况。该项目利用了三位研究人员在MEMS设计、封装和制造、集成光学和光传感、偏微分方程、波传播理论、多物理场建模、系统识别和土木工程结构健康监测系统损伤检测方面的跨学科专业知识。该设备将使用跨学科研究小组开发的独特基础设施进行设计、制造、封装和测试。教育目标是将微工程概念融入院系核心课程，开发一系列跨学科的本科和研究生课程，整合不同学科的概念，更重要的是强调将这些整合的知识应用于实际的工程设计。这些课程开发工作将在整个校园范围内的项目中协调，并与当地高科技产业合作。

The objective of this project is to develop a technology for robust and low maintenance cost sensor network capable to detect accelerations below a micro-g in a very wide frequency bandwidth (above 1,000 Hz). Sensor networks with such performance are critical for navigation, seismology, acoustic sensing, and for the health monitoring of civil structures including micro vibrations of high-tech facilities. A new technology based on batch fabrication of an array of high sensitivity accelerometers, each utilizing Fabry-Perot cavity of embedded optical detection, will be developed. The unique feature is that no local power source is required for each individual sensor, instead one global light source is used, which generates a b4roadband optical signal repaginating through the optical fiber network from sensor-to-sensor, thus carrying information through the network and providing an input signal to each individual sensor within the network. The global out put combined at the end point of the network and the health condition of the network is assessed in real-time based on the arrived "rainbow" of data. The project takes advantage of the combined cross-disciplinary expertise in design, packaging and fabrication of MEMS, integrated optics and optical sensing), partial differential equations, wave propagation theory, and multi-physics modeling, system identification and damage detection for the health monitoring systems of civil engineering structures of the three investigators involved. The proposed device will be designed, fabricated, packaged, and tested using unique infrastructures developed by this interdisciplinary research group. Educational goal is to assimilate micro-engineering concepts into departmental core courses, develop a series of interdisciplinary undergraduate and graduate courses that would integrate concepts from different disciplines, and, even more importantly, emphasize the application of this integrated knowledge to practical engineering design. These curriculum development efforts will be in coordination throughout the campus-wide programs and in cooperation with local high-tech industries.