Establishing an Industrial/University Cooperative Research Center for Micro and Nanoscale Contaminant Control at the University of Arizona

在亚利桑那大学建立微纳米污染物控制产学合作研究中心

• 批准号: 0332055
• 负责人: Harold Parks
• 金额: $ 15万
• 依托单位: University of Arizona
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2003
• 资助国家: 美国
• 起止时间: 2003-09-01 至 2006-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0332055&HistoricalAwards=false
• 关键词: Establishing; Industrial; University; Cooperative; Research

The Industry/University Cooperative Research Center (I/UCRC) for Microcontaminiaiton Control will expand and change its focus by transferring the lead university role to Northeastern University with the University of Arizona becoming an affiliate site. The Center's goal is to develop state of the art techniques primarily for micro and nanoscale contaminant control, removal and characterization in semiconductor manufacturing and fabrication processes. However, the broader impact of the Center focus will contribute to the competitiveness of the semiconductor, information technology, pharmaceutical, imaging, aerospace and other industries affected by particulate and ionic contamination.

微污染控制工业/大学合作研究中心（I/UCRC）将扩大和改变其重点，将主要大学角色转移到东北大学，亚利桑那大学成为附属机构。该中心的目标是开发最先进的技术，主要用于半导体制造和制造过程中的微纳米级污染物控制、去除和表征。然而，该中心关注的更广泛的影响将有助于半导体、信息技术、制药、成像、航空航天和其他受颗粒和离子污染影响的行业的竞争力。