CAREER: Robust Thin Film Shape Memory Alloys for Microelectromechanical Systems (MEMS)

职业：用于微机电系统 (MEMS) 的坚固薄膜形状记忆合金

• 批准号: 0347095
• 负责人: Ainissa Ramirez
• 金额: $ 59.93万
• 依托单位: Yale University
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2004
• 资助国家: 美国
• 起止时间: 2004-01-15 至 2008-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0347095&HistoricalAwards=false
• 关键词: CAREER; Robust; Thin; Film; Shape

This Career award to Yale University is to study shape memory alloys (such as NiTi), which have the unique ability of "remembering" their original shape when heated and can be used as thin film actuators for microelectromechanical systems (MEMS). Among the actuation modes in MEMS, shape memory alloys produce the largest actuation force and will benefit applications such as microvalves, micropumps, and micromanipulators. Despite these potential uses, integration of shape memory alloys in MEMS is limited, because their behavior is plagued with an acute compositional sensitivity. In addition, details of their thin film mechanical behavior, which often departs from bulk, remains largely unexplored. This award will study the affects of alloying on phase transformation temperature, hysteresis behavior, microstructure, actuation properties, and mechanical properties. In addition, the award will explore the behavior of thin film NiTi shape memory materials; improve their integration into the MEMS process; and broaden the understanding of thin film mechanical properties, by examining materials that exhibit elastic non-linearities. Structure-property relationship will be examined by observing the microstructure of shape memory alloys with electron microscopy; actuation properties with MEMS cantilevers; and transformation temperature behavior with differential scanning calorimetry and wafer curvature techniques. Proposed collaborations with industry, partner universities, and Brookhaven National Labs (BNL) would provide the fundamental understanding the properties of thin film shape memory alloys and their applications. Shape memory alloys and MEMS also provide a significant educational platform for they are compelling to both students and lay audiences. In addition to this research, a new undergraduate MEMS class will be developed as well as an outreach program that will encourage students to explore science through hands-on activities. A lecture series that showcases diverse scientists and fun science events will encourage all students, particularly women and minority students, to consider science. Other educational mechanisms include a web-based demonstration site, popular science writing, and collaborations with the National Science Resource Center (an arm of the Smithsonian Institute and the National Academies).

这项授予耶鲁大学的职业奖项是为了研究形状记忆合金(如NiTi)，这种合金在受热时具有独特的“记住”原始形状的能力，可用作微电子机械系统(MEMS)的薄膜致动器。在MEMS的驱动方式中，形状记忆合金产生的驱动力最大，将有利于微阀、微泵、微操作器等领域的应用。尽管有这些潜在的用途，但形状记忆合金在MEMS中的集成是有限的，因为它们的行为受到严重的成分敏感性的困扰。此外，它们的薄膜机械行为的细节通常与块状材料不同，在很大程度上仍未被探索。该奖项将研究合金化对相变温度、磁滞行为、显微组织、驱动性能和机械性能的影响。此外，该奖项还将探索薄膜NiTi形状记忆材料的行为；改进它们与MEMS工艺的集成；并通过研究表现出弹性非线性的材料，拓宽对薄膜机械性能的理解。通过用电子显微镜观察形状记忆合金的微观结构；用MEMS悬臂梁观察其驱动性能；用差示扫描量热仪和晶片曲率技术观察相变温度行为，来研究结构与性能之间的关系。与产业界、合作伙伴大学和布鲁克海文国家实验室(BNL)的拟议合作将有助于从根本上了解薄膜形状记忆合金的特性及其应用。形状记忆合金和MEMS也提供了一个重要的教育平台，因为它们对学生和非专业观众都很有吸引力。除了这项研究，还将开发一个新的本科生MEMS课程，以及一个外展计划，鼓励学生通过动手活动探索科学。一个展示不同科学家和有趣的科学活动的系列讲座将鼓励所有学生，特别是女性和少数族裔学生，考虑科学。其他教育机制包括基于网络的演示网站、科普写作，以及与国家科学资源中心(史密森研究所和国家科学院的一个分支)的合作。