MRI: Acquisition of a Tunable Infrared Laser and Chamber for the Deposition and Characterization of Thin Films of Ceramics, Oxides and Polymers

该主要研究仪器/本科院校研究（MRI/RUI）奖为高功率可调谐红外激光器，高功率紫外激光器和脉冲激光沉积真空室组件的收购提供资金。 与该机构现有的表征设备一起，该设备将用于材料研究的先进激光加工和聚合物，陶瓷和氧化物的薄膜沉积。 激光器用于蒸发真空室内的靶材料，然后将其沉积在基底上作为薄膜。 真空室具有多种特征和能力，包括靶的旋转和多靶转盘，其将使得能够沉积复合和/或多层膜。 薄膜可以在惰性或反应性背景气体中沉积，并且衬底可以被加热或冷却。 此外，还包括一个光学系统，允许激光束在目标上进行光栅扫描。 包括激光器在内，整个系统由计算机控制，并可根据多种用户要求进行配置。 这些仪器将用于研究和教育，特别是对物理、化学和生物学专业的本科生。这些仪器支持的研究将加深对激光与材料相互作用的理解，从而使薄膜沉积成为可能。 它将为来自各个科学部门的学生提供独特的研究机会，从而促进多学科研究计划。 这些工具将有利于正在进行的研究方案，并将为这些方案提供一个共同的参考点。 这些工具还将支持与现有课程直接重叠的研究，并加强课堂和实验室学习。 最后，使用这些仪器沉积的薄膜将对微电子、化学和生物传感等不同应用领域具有重要意义。

This Major Research Instrumentation/Research in Undergraduate Institution (MRI/RUI) award provides funds for the acquisition of a high power tunable infrared laser, a high power ultraviolet laser, and a pulsed laser deposition vacuum chamber assembly. Together with the institution's existing characterization equipment, this equipment will be used for advanced laser processing of materials research and thin film deposition of polymers, ceramics, and oxides. The lasers are used to evaporate target materials inside the vacuum chamber, which are then deposited upon substrates as thin films. The vacuum chamber has a variety of features and capabilities that include rotation of the target and a multi-target carousel that will enable the deposition of composite and/or multi-layer films. Thin films may be deposited in either an inert or reactive background gas and the substrate may be either heated or cooled. In addition an optical train is included that allows the laser beam to be rastered across the target. Including the lasers, the entire system is then computer controlled and may be configured for multiple user requirements. The instruments will be used for both research and education with particular emphasis on undergraduate students from physics, chemistry and biology.The research that is supported by these instruments will lead to a deeper understanding of the laser-material interaction that allows the deposition of thin films. It will provide unique research opportunities for students from across the science departments, thus fostering multidisciplinary research initiatives. The instruments will be of benefit to ongoing research programs and will provide a common reference point for these programs. The instruments will also support research that directly overlaps with existing curricula and reinforces classroom and laboratory learning. Finally, thin films deposited using these instruments will have importance to diverse application areas such as microelectronics and chemical and biological sensing.