U.S.-India Cooperative Research: Development of Metal Oxide Silicon/ Porous Silicon MEMS Sensor and Signal Processing Unit for Atmospheric Monitoring in Underground Coalmines

美印合作研究：开发用于地下煤矿大气监测的金属氧化物硅/多孔硅MEMS传感器和信号处理单元

• 批准号: 0422782
• 负责人: Prasanta Ghosh
• 金额: $ 1.09万
• 依托单位: Syracuse University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2004
• 资助国家: 美国
• 起止时间: 2004-08-15 至 2008-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0422782&HistoricalAwards=false
• 关键词: U.S.; India; Cooperative; Research; Development

0422782Ghosh Description: This award supports the US-India cooperative research entitled Development of Metal Oxide Silicon/Porus Silicon MEMS Sensor and Signal Processing Unit for Atmospheric Monitoring in Underground Coalmines. This is an exploratory study to address the limitations of existing mine gas sensors that will be conducted through a series of exchange visits between Professors Prasanta Ghosh, Syracuse University and Hiranmay Saha, Japavpur University, Kolkata, India. The PIs will collaborate in developing devices with the deposition of Zinc Oxide for sensing the desired toxic gases in underground coalmines. Additionally, they will detect the level of the gas and process the signal suitabity for onward transmission to the control room located at the surface. Scope: The collaborators will employ the complimentary strengths of Professor Ghosh in the area of thin film deposition and development of OTA based circuits with that of Professor Saha in the field of Porous Silicon and Silicon/Porous Silicon based MEMS Sensors. They expect their research to have broad impact in that it will lead to the development of relatively cheap and reliable atmospheric monitoring systems suitable for underground coalmines. It will also enrich fundamental knowledge in the field of MEMS and will lead to the development of Integrated Silicon Microsensors for gas and pressure sensing. Graduate and undergraduate students at both institutions will profit from presentations given by the researchers during exchange visits. The results will be disseminated broadly in journals and at conferences where they will present the research findings.

描述：该奖项支持美印合作研究，题为“用于地下煤矿大气监测的金属氧化硅/多孔硅MEMS传感器和信号处理单元的开发”。这是一项探索性研究，旨在解决现有地雷气体传感器的局限性，将通过雪城大学的Prasanta Ghosh教授和印度加尔各答Japavpur大学的Hiranmay Saha教授之间的一系列交流访问进行。pi将合作开发具有氧化锌沉积的设备，用于感应地下煤矿中所需的有毒气体。此外，他们将检测气体的水平，并处理信号，以便继续传输到位于地面的控制室。合作范围：合作伙伴将利用Ghosh教授在薄膜沉积和基于OTA的电路开发领域的优势，以及Saha教授在多孔硅和硅/多孔硅MEMS传感器领域的优势。他们希望他们的研究能够产生广泛的影响，因为它将导致开发出适用于地下煤矿的相对便宜和可靠的大气监测系统。它还将丰富MEMS领域的基础知识，并将导致用于气体和压力传感的集成硅微传感器的发展。两所大学的研究生和本科生将从研究人员在交流访问期间所做的报告中受益。研究结果将在期刊和会议上广泛传播，并在会议上展示研究成果。