MRI: Acquisition of a comprehensive plasma diagnostic system for research and education

建议没有。核磁共振：为研究和教育获得一个全面的等离子体诊断系统。这项主要研究仪器拨款用于获得三个最先进的等离子体诊断系统-光学发射光谱，残余气体分析和朗缪尔探针-定量和空间测量：中性和带电原子和分子的基态和激发态数密度和能量；以及低压等离子体中的电子数密度和能量。此次收购将立即显著促进以下三个当前和创新的材料和设备相关研究项目的进展：(1)开发一种在新型倒圆柱形磁控溅射系统中生长低温晶体α相氧化铝薄膜的工艺，需要在关键的衬底和目标位置进行空间和时间分辨的电子和离子密度和能量测量；(2)为了在航空电子系统中使用的致密、高性能、三维电子封装中生产合适的硅通孔，需要在两种反应离子蚀刻系统中进行等离子体表征；(3)利用DNA功能化的垂直排列碳纳米管实现生物传感器应用的巨大潜力，需要了解离子浓度和能量的作用，确定生长种类，并了解空间测量将提供的电子密度和能量的影响。所有三个基于等离子体的项目的工作都在进行中，但使用所要求的等离子体诊断设备可以显著提高生产力和基本了解。此次设备收购所带来的调查将有助于正在进行的本科和研究生研究，并改善现有的本科和研究生水平的教学，通过研究项目和课程直接影响近100名本科生和研究生。这项研究对行业和社会的影响也很重要，因为每个项目都提供了高价值的产品。拟议的项目还将为许多高中学生和教师、本科生和研究生提供重要的教育机会，这些学生和教师已经并将继续通过研究和课堂与阿肯色大学的教师进行互动。PI将继续积极招收代表性不足的本科生和研究生，并扩大目前的活动，让更多的少数民族和女性K-12学生和教师参与进来。

Proposal No. CTS-0619851Principal Investigator: M. Gordon, University of ArkansasMRI: Acquisition of a comprehensive plasma diagnostic system for research and education This Major Research Instrumentation grant is to acquire three state-of-the-art plasma diagnostic systems - optical emission spectroscopy, residual gas analysis, and Langmuir probe - to measure quantitatively and spatially: neutral and charged atomic and molecular ground and excited state number densities and energy; and electron number density and energy in low pressure plasmas. This acquisition will immediately and significantly enhance the progress of the following three current and innovative material- and device-related research projects: (1) develop a process for growing low temperature crystalline alpha-phase alumina thin films in a novel inverted cylindrical magnetron sputtering system requires spatially and time-resolved electron and ion density and energy measurements at the critical substrate and target locations, (2) to produce suitable vias in silicon crucial for dense, high performance, three-dimensional electronic packages used in avionic systems requires plasma characterization in two reactive ion etch systems, and (3) to realize the enormous potential of vertically aligned carbon nanotubes, functionalized with DNA for bio-sensor applications, requires understanding the role of ion concentration and energy, determination of growth species, and understanding the effects of electron density and energy that spatial measurements would provide. Work on all three plasma-based projects is on-going, but significantly enhanced productivity and fundamental understanding is possible using the requested plasma diagnostic equipment. The investigations enabled by this equipment acquisition will aid on-going undergraduate and graduate research and improve existing undergraduate and graduate level teaching, directly affecting nearly 100 undergraduate and graduate students through research projects and courses. The impact of this research on industry and society is also significant because each project offers a high-value product. The proposed projects will also generate significant educational opportunities for the many high school students and teachers, and undergraduate and graduate students that have interacted, and will continue to interact, with faculty at the University of Arkansas through research and classes. The PI will continue to actively recruit underrepresented undergraduate and graduate students, and expand his current activities to involve more minority and female K-12 students and teachers.