SGER: Constructing a femtosecond sub-10nm resolution photo-thermal imaging system using extreme ultraviolet (EUV) to study nanoscale thermal transport

摘要提案编号：CTS-0635579主要研究者： 杨容桂所属： 科罗拉多大学提案标题：SGER：构建一个飞秒次10 nm分辨率的光热成像系统，使用极紫外（EUV）研究纳米级的热transmitt摘要：为了更好地工程纳米结构的许多使能技术，如信息技术，能源技术和生物医学应用，有一个强烈的需要，同时研究纳米和超快尺度上的能量传输过程。 目前还不存在允许超快速和超高分辨率成像的工具。 为了应对这一挑战，并为科学界带来一个新的表征工具，纳米技术的发展，PI Ronggui杨和共同PI玛格丽特Murnane将合作开发一个高时间和高空间分辨率的光热成像系统，使用高能量和短波长飞秒（fs）EUV激光器在美国国家科学基金会赞助的EUV ERC在科罗拉多大学开发。如果成功的话，在这个项目中开发的光热成像系统，具有10 fs的时间分辨率和亚10 nm的空间分辨率将作为一个表征工具，研究在新的纳米结构材料和器件的热产生和传输。这样一个使能平台将促进未来几代纳米材料和器件的设计。由于对高能量EUV光源的有限访问，热传递界对EUV的了解非常少。该项目中的合作将有助于通过传播结果向热科学界通报EUV光源的最新进展。此外，该合作还将帮助培训几名年轻的研究生和本科生研究助理，以应对EUV光刻的热挑战。

ABSTRACTProposal Number: CTS-0635579Principal Investigator: Yang, RongguiAffiliation: University of ColoradoProposal Title: SGER: Constructing a femtosecond sub-10nm resolution photo-thermal imaging system using extreme ultraviolet (EUV) to study nanoscale thermal transportAbstract:To better engineer nanostructures for the many enabling technologies such as information technology, energy technology, and bio-medical applications, there is a strong need to study the energy transport processes on the nano and ultrafast scales simultaneously. Tools allowing both ultra fast and ultra high resolution imaging do not currently exist. To address this challenge and to bring to the scientific community a new characterization tool for nanotechnology development, the PI Ronggui Yang and the co-PI Margaret Murnane will collaborate to develop a high temporal and high spatial resolution photo-thermal imaging system using high energy and short wavelength femtosecond (fs) EUV laser developed in the NSF sponsored EUV ERC at The University of Colorado. If successful, the photo-thermal imaging system developed in this project which has a temporal resolution of 10fs and a sub-10nm spatial resolution will serve as a characterization tool for studying the heat generation and transport in novel nanostructured materials and devices. Such an enabling platform will facilitate the design for future generations of nanoscale materials and devices. Due to the limited access to high energy EUV light sources, very little knowledge on EUV has been available to the heat transfer community. The collaboration enabled in this project will help to inform the thermal science community to recent progress on EUV light sources through dissemination of results. The collaboration will in addition help to train several young graduate and undergraduate research assistants to address thermal challenges in EUV lithography.