STTR Phase I: A Lithographic Gelcasting Process using Nanoparticulates: An Enabling Technology for Mass Production of Microdevices with Nanoscale Features

STTR 第一阶段：使用纳米颗粒的光刻凝胶铸造工艺：具有纳米级特征的微型器件大规模生产的支持技术

• 批准号: 0637850
• 负责人: Jesse Shrock
• 金额: --
• 依托单位: Advanced Powder Products, Inc.
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2007
• 资助国家: 美国
• 起止时间: 2007-01-01 至 2007-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0637850&HistoricalAwards=false
• 关键词: STTR; Phase; Lithographic; Gelcasting; Process

This Small Business Technology Transfer (STTR) Phase I project aims to develop the technology for the manufacture of complex 3-D micro-devices from an array of metal and ceramic nanometer-scale particulates. In a novel lithographic gelcasting (LGC) process, multilayer molds will be made using standard photolithography techniques used in the semiconductor industry, and each mold layer cast with nanometer-scale particulate materials. The resulting multilayer parts will then be sintered to fuse the particles into a dense solid. The innovation will expand the suite of available micro-manufacturing processes, allowing more complex parts to be made from a much wider variety of materials. The broad impact of this research will be the manufacture of micro-surgical instruments to enable the next generation of minimally invasive surgical procedures. The technology developed under the NSF STTR funding will be transferred to industry via commercialization. The technology could also have profound implications in a wide range of industries where ceramic and metal microscale devices are needed. For example, all the micro-mechanical systems being proposed such as micro air and land vehicles, micro robots, and micro surveillance system must be assembled from robust micro-components that can withstand the environments, stresses, and fatigue lives of their macroscopic counterparts.

该小型企业技术转让 (STTR) 第一阶段项目旨在开发利用一系列金属和陶瓷纳米级颗粒制造复杂 3D 微型器件的技术。 在新型光刻凝胶铸造（LGC）工艺中，将使用半导体行业中使用的标准光刻技术来制造多层模具，并且每个模具层都用纳米级颗粒材料铸造。 然后将所得的多层部件进行烧结，将颗粒熔合成致密的固体。 这项创新将扩展可用的微制造工艺套件，允许用更广泛的材料制造更复杂的零件。 这项研究的广泛影响将是显微手术器械的制造，以实现下一代微创手术。 NSF STTR 资助下开发的技术将通过商业化转移到工业界。 该技术还可能对需要陶瓷和金属微型设备的广泛行业产生深远的影响。例如，所有提出的微型机械系统，如微型空中和陆地车辆、微型机器人和微型监视系统，都必须由坚固的微型部件组装而成，这些部件能够承受宏观对应物的环境、应力和疲劳寿命。