SBIR Phase I: Design and Fabrication of a Novel Electrostatic Micro Energy Harvester

SBIR 第一阶段：新型静电微型能量收集器的设计和制造

• 批准号: 0711677
• 负责人: Gang Zhang
• 金额: --
• 依托单位: Echemics
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2007
• 资助国家: 美国
• 起止时间: 2007-07-01 至 2008-03-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0711677&HistoricalAwards=false
• 关键词: SBIR; Phase; Design; Fabrication; Novel

This Small Business Innovation Research (SBIR) Phase I research project proposes to investigate the feasibility of making a vibration-based silicon electrostatic micro energy harvester with a high Actual Achievable Power Density (AAPD) for powering wireless sensor network nodes. This research proposes a new route to increase converted power by increasing the AAPD of an energy harvester. The innovation of this research includes a novel electrostatic harvester design and a novel process for making this design. The primary technical objective is to demonstrate if the proposed design can indeed be fabricated with the proposed process. The specific research activities include harvester design and microfabrication process integration and optimization. Batteries are not always an ideal choice if the lifetime, volume and replacement accessibility of a power source are restricted. Harvesting energy from the environment to power microelectronics devices has become an alternative solution. As energy harvesters produce power in the microW to mW range, outputting electric energy as much as possible is the primary goal of energy harvester development. The principal application of the proposed energy harvester is for wireless sensor networks (WSN). Currently, one of the biggest technical challenges for the commercialization of WSN is to provide a cost-effective power solution. Energy harvesters are highly attractive as they can supply long-lived power; reduce the cost of installation and maintenance; and enable completely self-powered wireless and battery-free sensor nodes.

这项小型企业创新研究(SBIR)第一阶段研究项目建议研究制造一种基于振动的硅静电微能量采集器的可行性，该采集器具有高实际可实现功率密度(AAPD)，用于为无线传感器网络节点供电。本研究提出了一种通过提高能量采集机的AAPD值来提高转换功率的新途径。本研究的创新之处包括一种新颖的静电收割机设计和一种新颖的静电收割机制作工艺。主要的技术目标是证明拟议的设计是否真的可以用拟议的工艺制造。具体的研究活动包括收割机的设计和微制造工艺的集成和优化。如果电源的寿命、体积和更换可及性受到限制，电池并不总是理想的选择。从环境中获取能源为微电子设备提供动力已成为一种替代解决方案。由于能量采集器产生的功率在微瓦到兆瓦的范围内，尽可能多地输出电能是能量采集器发展的首要目标。该能量采集器主要应用于无线传感器网络(WSN)。目前，无线传感器网络商业化面临的最大技术挑战之一是提供性价比高的电源解决方案。能量收集器非常有吸引力，因为它们可以提供长寿命的电力，降低安装和维护成本，并实现完全自供电的无线和无电池传感器节点。